Inventor · disambiguated record
Axel Scholz
Also filed as: SCHOLZ AXEL
26 granted patents·140 citations·filing 1999–2017
95Inventor score
Files withZEISS CARL SMT GMBH8ZEISS CARL SMT AG6EDSCHA TRAILER SYSTEMS GMBH3SCHOLZ AXEL2WENSING UDO2
Top patents by PatentIndex Score
26 records- 0193US7473907B2Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illuminationZEISS CARL SMT AG·Filed 2005·Granted Jan 6, 2009·26 cites·29 claims
- 0288US7408622B2Illumination system and polarizer for a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2004·Granted Aug 5, 2008·27 cites·71 claims
- 0384US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 0483US7875865B2EUV illumination system with a system for measuring fluctuations of the light sourceZEISS CARL SMT AG·Filed 2008·Granted Jan 25, 2011·9 cites·29 claims
- 0582US8004656B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2006·Granted Aug 23, 2011·5 cites·18 claims
- 0678US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 0777US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0873US7940375B2Transmission filter apparatusZEISS CARL SMT GMBH·Filed 2005·Granted May 10, 2011·3 cites·37 claims
- 0971US8513628B2EUV illumination system with a system for measuring fluctuations of the light sourceSCHOLZ AXEL·Filed 2010·Granted Aug 20, 2013·2 cites·21 claims
- 1070US9606441B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Mar 28, 2017·1 cites·20 claims
- 1169US9217930B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Dec 22, 2015·1 cites·25 claims
- 1269US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
- 1368USD751024SGuide rails for a tarpaulin cover of a commercial vehicleEDSCHA TRAILER SYSTEMS GMBH·Filed 2014·Granted Mar 8, 2016·17 cites·1 claims
- 1468US8395756B2Illumination system for a microlithographic projection exposure apparatusWANGLER JOHANNES·Filed 2008·Granted Mar 12, 2013·2 cites·49 claims
- 1568US7686505B2Method and system for indirect determination of local irradiance in an optical systemZEISS CARL SMT AG·Filed 2006·Granted Mar 30, 2010·4 cites·12 claims
- 1660US8469436B2Clamping deviceWENSING UDO·Filed 2010·Granted Jun 25, 2013·3 cites·5 claims
- 1760US8454230B2Method and system for indirect determination of local irradiance in an optical systemMELZER FRANK·Filed 2010·Granted Jun 4, 2013·1 cites·39 claims
- 1857US10088754B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 2, 2018·0 cites·19 claims
- 1956US9575414B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Feb 21, 2017·0 cites·22 claims
- 2056US7847920B2Illumination system and polarizer for a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2007·Granted Dec 7, 2010·0 cites·13 claims
- 2156US6408930B1Adjustable plate moldMANNESMANN AG·Filed 1999·Granted Jun 25, 2002·8 cites·9 claims
- 2252US8730455B2Illumination system for a microlithographic projection exposure apparatusFIOLKA DAMIAN·Filed 2011·Granted May 20, 2014·0 cites·10 claims
- 2352US8403396B2Roller carriage for a sliding bow roof for a truck or truck trailerWENSING UDO·Filed 2010·Granted Mar 26, 2013·2 cites·14 claims
- 2448US9753375B2Illumination optical unit for projection lithographyZEISS CARL SMT GMBH·Filed 2014·Granted Sep 5, 2017·0 cites·15 claims
- 2547USD750544SGuide rails for a tarpaulin cover of a commercial vehicleEDSCHA TRAILER SYSTEMS GMBH·Filed 2014·Granted Mar 1, 2016·7 cites·1 claims
- 2642USD753576SGuide rails for a tarpaulin cover of a commercial vehicleEDSCHA TRAILER SYSTEMS GMBH·Filed 2014·Granted Apr 12, 2016·5 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →