Inventor · disambiguated record
Bausan Yuan
Also filed as: YUAN BAUSAN
39 granted patents·25 pending applications·679 citations·filing 1996–2024
98Inventor score
Top patents by PatentIndex Score
64 records- 0193US8767172B2Projection optical device and exposure apparatusEBIHARA AKIMITSU·Filed 2010·Granted Jul 1, 2014·8 cites·39 claims
- 0290US6008610APosition control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning systemNIKON CORP·Filed 1998·Granted Dec 28, 1999·79 cites·25 claims
- 0390US5777403AVoice coil motor with air guide and air bellowsNIKON CORP·Filed 1996·Granted Jul 7, 1998·73 cites·12 claims
- 0489US10477128B2Neighborhood haze density estimation for single-image dehazeNIKON CORP·Filed 2018·Granted Nov 12, 2019·9 cites·26 claims
- 0589US7172493B2Fine force actuator assembly for chemical mechanical polishing apparatusesNIKON CORP·Filed 2005·Granted Feb 6, 2007·14 cites·46 claims
- 0689US6590639B1Active vibration isolation system having pressure controlNIKON CORP·Filed 2000·Granted Jul 8, 2003·35 cites·29 claims
- 0788US7417714B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageNIKON CORP·Filed 2005·Granted Aug 26, 2008·10 cites·25 claims
- 0887US6486941B1Guideless stageNIKON CORP·Filed 2000·Granted Nov 26, 2002·28 cites·79 claims
- 0987US6260282B1Stage control with reduced synchronization error and settling timeNIKON CORP·Filed 1998·Granted Jul 17, 2001·84 cites·20 claims
- 1085US6130517AMagnetic actuator producing large acceleration on fine stage and low RMS power gainNIKON CORP·Filed 1998·Granted Oct 10, 2000·64 cites·27 claims
- 1185US6069417AStage having paired E/I core actuator controlNIKON CORP·Filed 1998·Granted May 30, 2000·60 cites·12 claims
- 1282US6927505B2Following stage planar motorNIKON CORP·Filed 2001·Granted Aug 9, 2005·27 cites·16 claims
- 1380US8140288B2On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stageYANG PAI-HSUEH·Filed 2007·Granted Mar 20, 2012·6 cites·41 claims
- 1479US9465305B2Method for determining a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Oct 11, 2016·3 cites·41 claims
- 1578US6320345B1Command trajectory for driving a stage with minimal vibrationNIKON CORP·Filed 1998·Granted Nov 20, 2001·41 cites·34 claims
- 1673US6472777B1Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuatorsNIKON CORP·Filed 2000·Granted Oct 29, 2002·19 cites·24 claims
- 1772US7989756B2Active-isolation mounts for optical elementsNIKON CORP·Filed 2008·Granted Aug 2, 2011·3 cites·36 claims
- 1872US7583361B2System for controlling a dual mover assembly for an exposure apparatusNIKON CORP·Filed 2006·Granted Sep 1, 2009·3 cites·29 claims
- 1971US5940789AStage control method and apparatus with varying stage controller parameterNIKON CORP·Filed 1996·Granted Aug 17, 1999·30 cites·25 claims
- 2068US8582080B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageBINNARD MICHAEL·Filed 2008·Granted Nov 12, 2013·2 cites·24 claims
- 2168US6646719B2Support assembly for an exposure apparatusNIKON CORP·Filed 2001·Granted Nov 11, 2003·9 cites·75 claims
- 2268US2025053105A1Systems and methods for monitoring spatial light modulator (slm) flareNIKON CORP·Filed 2024·Application pending·0 cites
- 2367US2025130510A1Vibration control of structural elements of exposure apparatusNIKON CORP·Filed 2024·Application pending·0 cites
- 2466US9013134B2Method for determing a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Apr 21, 2015·1 cites·20 claims
- 2566US6987558B2Reaction mass for a stage deviceNIKON CORP·Filed 2001·Granted Jan 17, 2006·8 cites·51 claims
- 2665US11223303B2Motor with force constant modeling and identification for flexible mode controlNIKON RES CORPORATION OF AMERICA·Filed 2018·Granted Jan 11, 2022·1 cites·20 claims
- 2765US7333179B2Moving mechanism with high bandwidth response and low force transmissibilityNIKON CORP·Filed 2004·Granted Feb 19, 2008·7 cites·43 claims
- 2862US7366642B2Minimum force output control method for counter-mass with cableNIKON CORP·Filed 2005·Granted Apr 29, 2008·2 cites·30 claims
- 2961US11401450B2Fluid synthesis systemNIKON CORP·Filed 2019·Granted Aug 2, 2022·0 cites·12 claims
- 3061US8836252B2Linearized control of piezoelectric actuator to reduce hysteresisNIKON CORP·Filed 2012·Granted Sep 16, 2014·1 cites·24 claims
- 3160US7061577B2Image adjustor including damping assemblyNIKON CORP·Filed 2002·Granted Jun 13, 2006·6 cites·139 claims
- 3258US7034474B2Auto-calibration of attraction-only type actuator commutationsNIKON CORP·Filed 2004·Granted Apr 25, 2006·9 cites·53 claims
- 3357US6686990B2Scanning exposure method with reduced time between scansNIKON CORP INC·Filed 2000·Granted Feb 3, 2004·5 cites·27 claims
- 3456US8619361B2Direct derivative feedforward vibration compensation systemHSIN YI-PING·Filed 2010·Granted Dec 31, 2013·1 cites·20 claims
- 3556US6855032B1Fine force control of actuators for chemical mechanical polishing apparatusesNIKON CORP·Filed 2003·Granted Feb 15, 2005·6 cites·31 claims
- 3656US2024161395A1Methods and systems for forming three-diimensional 3d models of objectsNIKON CORP·Filed 2023·Application pending·0 cites
- 3755US6285438B1Scanning exposure method with reduced time between scansNIKON CORP·Filed 1999·Granted Sep 4, 2001·12 cites·7 claims
- 3852US2007115451A1Lithographic System with Separated Isolation StructuresNIKON CORP·Filed 2007·Application pending·0 cites
- 3951US7253576B2E/I core actuator commutation formula and control methodNIKON CORP·Filed 2004·Granted Aug 7, 2007·3 cites·32 claims
- 4049US2008068568A1Projection Optical Device And Exposure ApparatusNIKON CORP·Filed 2005·Application pending·0 cites
- 4143US6509953B1Apparatus for exposing a pattern onto an object with controlled scanningNIKON CORP·Filed 1998·Granted Jan 21, 2003·10 cites·17 claims
- 4243US2006038972A1Lithographic system with separated isolation structuresNIKON CORP·Filed 2004·Application pending·0 cites
- 4343US2007236854A1Anti-Gravity Device for Supporting Weight and Reducing TransmissibilityLEE MARTIN E·Filed 2006·Application pending·0 cites
- 4442US7876452B2Interferometric position-measuring devices and methodsNIKON CORP·Filed 2008·Granted Jan 25, 2011·0 cites·39 claims
- 4541US6963821B2Stage counter mass systemNIKON CORP·Filed 2003·Granted Nov 8, 2005·0 cites·39 claims
- 4641US2005197045A1Fine force control of actuators for chemical mechanical polishing apparatusesFiled 2005·Application pending·0 cites
- 4741US2006170382A1Linear motor force ripple identification and compensation with iterative learning controlNIKON CORP·Filed 2005·Application pending·0 cites
- 4840US2007284502A1Hexapod kinematic mountings for optical elements, and optical systems comprising sameNIKON CORP·Filed 2006·Application pending·0 cites
- 4940US2007030462A1Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambersNIKON CORP·Filed 2005·Application pending·0 cites
- 5040US2008109178A1Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatusNIKON CORP·Filed 2007·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →