Inventor · disambiguated record
Bernd Doerband
Also filed as: DOERBAND BERND
21 granted patents·3 pending applications·163 citations·filing 2004–2018
94Inventor score
Top patents by PatentIndex Score
24 records- 0196US7605926B1Optical system, method of manufacturing an optical system and method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2008·Granted Oct 20, 2009·47 cites·6 claims
- 0291US7936521B2Method of measuring a deviation of an optical surface from a target shapeZEISS CARL SMT GMBH·Filed 2010·Granted May 3, 2011·9 cites·13 claims
- 0391US7436520B1Method of calibrating an interferometer optics and of processing an optical element having an optical surfaceZEISS CARL SMT AG·Filed 2005·Granted Oct 14, 2008·31 cites·44 claims
- 0484US10101667B2Method for aligning a mirror of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Oct 16, 2018·2 cites·19 claims
- 0581US8269981B1Method and an apparatus for measuring a deviation of an optical test surface from a target shapeDOERBAND BERND·Filed 2009·Granted Sep 18, 2012·17 cites·26 claims
- 0680US7167251B1Method of processing an optical substrateZEISS CARL SMT AG·Filed 2005·Granted Jan 23, 2007·10 cites·22 claims
- 0778US9250062B2Devices for determining layer thickness and/or contamination level of a beltZEISS CARL SMT GMBH·Filed 2014·Granted Feb 2, 2016·3 cites·20 claims
- 0878US8089634B2Optical element and method of calibrating a measuring apparatus comprising a wave shaping structureHETZLER JOCHEN·Filed 2010·Granted Jan 3, 2012·4 cites·20 claims
- 0970US8508749B2Method of measuring a deviation of an optical surface from a target shape using interferometric measurement resultsARNOLD RALF·Filed 2012·Granted Aug 13, 2013·2 cites·18 claims
- 1070US8243281B2Method and system for measuring a surface of an objectDOERBAND BERND·Filed 2008·Granted Aug 14, 2012·7 cites·8 claims
- 1169US8264695B2Method of measuring a deviation of an optical surface from a target shapeARNOLD RALF·Filed 2011·Granted Sep 11, 2012·2 cites·17 claims
- 1267US9310693B2Method for operating a projection exposure tool and control apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Apr 12, 2016·1 cites·29 claims
- 1366US7522292B2System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shapeZEISS CARL SMT AG·Filed 2006·Granted Apr 21, 2009·5 cites·46 claims
- 1466US7274467B2Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2005·Granted Sep 25, 2007·5 cites·38 claims
- 1565US8687203B2Method and apparatus for determining a shape of an optical test surfaceDOERBAND BERND·Filed 2012·Granted Apr 1, 2014·2 cites·11 claims
- 1663US8593642B2Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring deviceFREIMANN ROLF·Filed 2012·Granted Nov 26, 2013·2 cites·13 claims
- 1761US10359703B2Method for aligning a mirror of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Jul 23, 2019·0 cites·18 claims
- 1855US7133225B1Method of manufacturing an optical systemZEISS CARL SMT AG·Filed 2004·Granted Nov 7, 2006·7 cites·16 claims
- 1951US7791737B2Method and apparatus for interferometrically measuring the shape of a test objectZEISS CARL SMT AG·Filed 2007·Granted Sep 7, 2010·2 cites·24 claims
- 2049US2014078513A1Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring deviceZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 2147US7738117B2Method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2007·Granted Jun 15, 2010·3 cites·17 claims
- 2245US7581305B2Method of manufacturing an optical componentZEISS CARL SMT AG·Filed 2004·Granted Sep 1, 2009·2 cites·24 claims
- 2337US2005275849A1Method of calibrating an interferometer and method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 2436US2005225774A1Method for measuring and manufacturing an optical element and optical apparatusZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →