Inventor · disambiguated record
Bernard L. Hwang
Also filed as: HWANG BERNARD L · HWANG BERNARD LLOYD
18 granted patents·2 pending applications·58 citations·filing 2010–2024
91Inventor score
Top patents by PatentIndex Score
20 records- 0191USD1034491SEdge ringAPPLIED MATERIALS INC·Filed 2020·Granted Jul 9, 2024·17 cites·1 claims
- 0291US9312154B2CVD apparatus for improved film thickness non-uniformity and particle performanceTRAN BINH·Filed 2010·Granted Apr 12, 2016·17 cites·20 claims
- 0390US11380575B2Film thickness uniformity improvement using edge ring and bias electrode geometryAPPLIED MATERIALS INC·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0486US11581408B2Method and apparatus for selective nitridation processAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·1 cites·17 claims
- 0586US9831091B2Plasma treating a process chamberAPPLIED MATERIALS INC·Filed 2016·Granted Nov 28, 2017·4 cites·10 claims
- 0682US9117867B2Electrostatic chuck assemblyHWANG BERNARD L·Filed 2012·Granted Aug 25, 2015·8 cites·20 claims
- 0780US11017984B2Ceramic coated quartz lid for processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 25, 2021·2 cites·20 claims
- 0880US10049881B2Method and apparatus for selective nitridation processROGERS MATTHEW S·Filed 2012·Granted Aug 14, 2018·4 cites·7 claims
- 0978US12009178B2Ceramic coated quartz lid for processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
- 1074US12487121B2Methods for calibrating an optical emission spectrometerAPPLIED MATERIALS INC·Filed 2024·Granted Dec 2, 2025·0 cites·20 claims
- 1173US10290504B2Plasma treating a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 14, 2019·1 cites·16 claims
- 1273US9048190B2Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2013·Granted Jun 2, 2015·2 cites·14 claims
- 1371US12266560B2Film thickness uniformity improvement using edge ring and bias electrode geometryAPPLIED MATERIALS INC·Filed 2022·Granted Apr 1, 2025·0 cites·20 claims
- 1471US11521830B2Ceramic coated quartz lid for processing chamberAPPLIED MATERIALS INC·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 1560US11927482B2Methods for calibrating an optical emission spectrometerAPPLIED MATERIALS INC·Filed 2020·Granted Mar 12, 2024·0 cites·20 claims
- 1660US10950698B2Method and apparatus for selective nitridation processAPPLIED MATERIALS INC·Filed 2018·Granted Mar 16, 2021·0 cites·20 claims
- 1750US10971357B2Thin film treatment processAPPLIED MATERIALS INC·Filed 2018·Granted Apr 6, 2021·0 cites·20 claims
- 1846US2022013336A1Process kit with protective ceramic coatings for hydrogen and nh3 plasma applicationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1946US2015332941A1Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 2042US11127620B2Electrostatic chuck for high temperature processing chamberAPPLIED MATERIALS INC·Filed 2018·Granted Sep 21, 2021·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →