Inventor · disambiguated record
Benjamin Sigel
Also filed as: SIGEL BENJAMIN
3 granted patents·6 pending applications·4 citations·filing 2007–2022
56Inventor score
Top patents by PatentIndex Score
9 records- 0174US9851555B2Optical componentZEISS CARL SMT GMBH·Filed 2016·Granted Dec 26, 2017·3 cites·20 claims
- 0260US9030644B2Projection exposure apparatus for semiconductor lithography including an actuator systemSIGEL BENJAMIN·Filed 2011·Granted May 12, 2015·1 cites·25 claims
- 0354US2019121238A1Projection exposure apparatus for semiconductor lithography including an actuator systemZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 0453US2022308466A1Device for cleaning a surface in the interior of an optical systemZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 0548US2013038848A1Optical devices having kinematic componentsZEISS CARL SMT GMBH·Filed 2012·Application pending·0 cites
- 0645US2010128367A1Projection objective for a microlithography apparatus and methodZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0745US2015316855A1Projection exposure apparatus for semiconductor lithography including an actuator systemZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 0844US2008117397A1Optical devices having kinemtaic componentsZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 0932US9964673B2Optical system with aperture device having plurality of aperture elementsSIGEL BENJAMIN·Filed 2011·Granted May 8, 2018·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →