Inventor · disambiguated record
Boxue Chen
Also filed as: CHEN BOXUE
5 granted patents·7 pending applications·10 citations·filing 2017–2025
70Inventor score
Top patents by PatentIndex Score
12 records- 0194US11143604B1Soft x-ray optics with improved filteringKLA CORP·Filed 2020·Granted Oct 12, 2021·4 cites·9 claims
- 0289US10712145B2Hybrid metrology for patterned wafer characterizationKLA TENCOR CORP·Filed 2017·Granted Jul 14, 2020·6 cites·20 claims
- 0376US2024288388A1Soft X-Ray Optics With Improved FilteringKLA CORP·Filed 2024·Application pending·0 cites
- 0474US12480893B2Optical and X-ray metrology methods for patterned semiconductor structures with randomnessKLA CORP·Filed 2024·Granted Nov 25, 2025·0 cites·39 claims
- 0571US12025575B2Soft x-ray optics with improved filteringKLA CORP·Filed 2021·Granted Jul 2, 2024·0 cites·9 claims
- 0668US2025237619A1Optical and x-ray metrology methods for patterned semiconductor structures with randomnessKLA CORP·Filed 2025·Application pending·0 cites
- 0758US12449386B2Forward library based seeding for efficient X-ray scatterometry measurementsKLA CORP·Filed 2023·Granted Oct 21, 2025·0 cites·20 claims
- 0858US2025305950A1Combined Ellipsometry and ScatterometryKLA CORP·Filed 2025·Application pending·0 cites
- 0958US2025123225A1Spectra delta metrologyKLA CORP·Filed 2024·Application pending·0 cites
- 1052US2024060914A1Methods And Systems For X-Ray Scatterometry Measurements Employing A Machine Learning Based Electromagnetic Response ModelKLA CORP·Filed 2022·Application pending·0 cites
- 1151US2024085321A1Methods And Systems For Model-less, Scatterometry Based Measurements Of Semiconductor StructuresKLA CORP·Filed 2023·Application pending·0 cites
- 1248US2024302301A1X-Ray Scatterometry Based Measurements Of Memory Array Structures Stacked With Complex Logic StructuresKLA CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →