Inventor · disambiguated record
Bret Whiteside
Also filed as: WHITESIDE BRET
15 granted patents·2 pending applications·90 citations·filing 2008–2025
90Inventor score
Top patents by PatentIndex Score
17 records- 0196US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 0287US10324045B2Surface defect inspection with large particle monitoring and laser power controlKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·20 claims
- 0384US8432944B2Extending the lifetime of a deep UV laser in a wafer inspection toolROMANOVSKY ANATOLY·Filed 2011·Granted Apr 30, 2013·8 cites·8 claims
- 0483US9664909B1Monolithic optical beam splitter with focusing lensKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·8 cites·11 claims
- 0579US10215712B2Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection systemWOLTERS CHRISTIAN·Filed 2014·Granted Feb 26, 2019·3 cites·9 claims
- 0677US8134698B1Dynamic range extension in surface inspection systemsWOLTERS CHRISTIAN·Filed 2008·Granted Mar 13, 2012·6 cites·26 claims
- 0774US12322620B2Reflective waveplates for pupil polarization filteringKLA CORP·Filed 2022·Granted Jun 3, 2025·0 cites·21 claims
- 0872US12444630B2Single-material waveplates for pupil polarization filteringKLA CORP·Filed 2022·Granted Oct 14, 2025·0 cites·11 claims
- 0970US9068952B2Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection systemPETRENKO ALEKSEY·Filed 2009·Granted Jun 30, 2015·4 cites·9 claims
- 1068US2025354939A1Multi-azimuth illumination and imaging inspection system and methodKLA CORP·Filed 2024·Application pending·0 cites
- 1167US9182358B2Multi-spot defect inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 10, 2015·1 cites·31 claims
- 1254US2025264415A1Dynamic range extension of optical systems with multiple low intensity beamsKLA CORP·Filed 2025·Application pending·0 cites
- 1352US11733172B2Apparatus and method for rotating an optical objectiveKLA CORP·Filed 2021·Granted Aug 22, 2023·0 cites·38 claims
- 1451US9678350B2Laser with integrated multi line or scanning beam capabilityKLA TENCOR CORP·Filed 2013·Granted Jun 13, 2017·0 cites·20 claims
- 1548US11181484B1Systems and methods for advanced defect ablation protectionKLA CORP·Filed 2020·Granted Nov 23, 2021·0 cites·20 claims
- 1643US11366307B2Programmable and reconfigurable mask with MEMS micro-mirror array for defect detectionKLA CORP·Filed 2020·Granted Jun 21, 2022·0 cites·19 claims
- 1743US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →