Inventor · disambiguated record
Carl T. Petersen
Also filed as: PETERSEN CARL T · PETERSEN III CARL T
8 granted patents·753 citations·filing 1974–2009
91Inventor score
Top patents by PatentIndex Score
8 records- 0196US5352294AAlignment of a shadow frame and large flat substrates on a supportWHITE JOHN M·Filed 1993·Granted Oct 4, 1994·148 cites·20 claims
- 0295US6488824B1Sputtering apparatus and process for high rate coatingsRAYCOM TECHNOLOGIES INC·Filed 2000·Granted Dec 3, 2002·255 cites·38 claims
- 0394US5611865AAlignment of a shadow frame and large flat substrates on a heated supportAPPLIED MATERIALS INC·Filed 1996·Granted Mar 18, 1997·116 cites·4 claims
- 0490US4433951AModular loadlockLAM RES CORP·Filed 1981·Granted Feb 28, 1984·98 cites·10 claims
- 0589US5873989AMethods and apparatus for linear scan magnetron sputteringINTEVAC INC·Filed 1997·Granted Feb 23, 1999·69 cites·16 claims
- 0680US3958124AMethod and apparatus for sem specimen coating and transferETEC CORP·Filed 1974·Granted May 18, 1976·19 cites·6 claims
- 0778US4483654AWorkpiece transfer mechanismLAM RES CORP·Filed 1983·Granted Nov 20, 1984·48 cites·4 claims
- 0847US8697189B2Method and apparatus for precision surface modification in nano-imprint lithographyXU REN·Filed 2009·Granted Apr 15, 2014·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →