Inventor · disambiguated record
Cangshan Xu
Also filed as: XU CANGSHAN
20 granted patents·2 pending applications·568 citations·filing 1999–2008
96Inventor score
Top patents by PatentIndex Score
22 records- 0196US6561889B1Methods for making reinforced wafer polishing pads and apparatuses implementing the sameLAM RES CORP·Filed 2000·Granted May 13, 2003·83 cites·35 claims
- 0295US7001243B1Neural network control of chemical mechanical planarizationLAM RES CORP·Filed 2003·Granted Feb 21, 2006·76 cites·14 claims
- 0394US6406363B1Unsupported chemical mechanical polishing beltLAM RES CORP·Filed 1999·Granted Jun 18, 2002·113 cites·2 claims
- 0493US6930782B1End point detection with imaging matching in semiconductor processingLAM RES CORP·Filed 2003·Granted Aug 16, 2005·56 cites·32 claims
- 0591US6572463B1Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the sameLAM RES CORP·Filed 2000·Granted Jun 3, 2003·56 cites·27 claims
- 0684US6315634B1Method of optimizing chemical mechanical planarization processLAM RES CORP·Filed 2000·Granted Nov 13, 2001·31 cites·20 claims
- 0783US6806100B1Molded end point detection window for chemical mechanical planarizationLAM RES CORP·Filed 2002·Granted Oct 19, 2004·23 cites·32 claims
- 0882US6656030B2Unsupported chemical mechanical polishing beltLAM RES CORP·Filed 2001·Granted Dec 2, 2003·19 cites·11 claims
- 0979US6931330B1Methods for monitoring and controlling chemical mechanical planarizationLAM RES CORP·Filed 2003·Granted Aug 16, 2005·23 cites·24 claims
- 1074US6949020B2Methods for making reinforced wafer polishing pads and apparatuses implementing the sameLAM RES CORP·Filed 2003·Granted Sep 27, 2005·13 cites·16 claims
- 1174US6712679B2Platen assembly having a topographically altered platen surfaceLAM RES CORP·Filed 2001·Granted Mar 30, 2004·18 cites·40 claims
- 1269US6790128B1Fluid conserving platen for optimizing edge polishingLAM RES CORP·Filed 2002·Granted Sep 14, 2004·13 cites·21 claims
- 1366US6552812B1Method and system for measuring threshold lengthLAM RES CORP·Filed 2000·Granted Apr 22, 2003·13 cites·36 claims
- 1464US6729945B2Apparatus for controlling leading edge and trailing edge polishingLAM RES CORP·Filed 2001·Granted May 4, 2004·11 cites·23 claims
- 1560US7982194B2Single nanoparticle tracking spectroscopic microscopeUNIV CALIFORNIA·Filed 2008·Granted Jul 19, 2011·1 cites·22 claims
- 1659US6953391B1Methods for reducing slurry usage in a linear chemical mechanical planarization systemLAM RES CORP·Filed 2004·Granted Oct 11, 2005·8 cites·10 claims
- 1756US6991512B2Apparatus for edge polishing uniformity controlLAM RES CORP·Filed 2001·Granted Jan 31, 2006·5 cites·6 claims
- 1851US6620035B2Grooved rollers for a linear chemical mechanical planarization systemLAM RES CORP·Filed 2001·Granted Sep 16, 2003·3 cites·21 claims
- 1949US6761626B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2001·Granted Jul 13, 2004·3 cites·11 claims
- 2041US7018276B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2004·Granted Mar 28, 2006·0 cites·15 claims
- 2136US2004266192A1Application of heated slurry for CMPLAM RES CORP·Filed 2003·Application pending·0 cites
- 2230US2002090819A1Windowless belt and method for improved in-situ wafer monitoringFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →