Inventor · disambiguated record
Cedric Affentauschegg
Also filed as: AFFENTAUSCHEGG CEDRIC · AFFENTAUSCHEGG CEDRIC MARC
4 granted patents·23 citations·filing 2000–2017
73Inventor score
Top patents by PatentIndex Score
4 records- 0182US10324379B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Jun 18, 2019·3 cites·14 claims
- 0274US6806966B1Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECHOLOGIES CORP·Filed 2000·Granted Oct 19, 2004·14 cites·41 claims
- 0372US10545410B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2017·Granted Jan 28, 2020·1 cites·20 claims
- 0469US7505144B2Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECH CORP·Filed 2004·Granted Mar 17, 2009·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →