Inventor · disambiguated record
Chien-Fu Chu
Also filed as: CHU CHIEN-FU
1 granted patent·1 pending application·0 citations·filing 2005–2006
9Inventor score
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2 records- 0143US7732009B2Method of cleaning reaction chamber, method of forming protection film and protection waferUNITED MICROELECTRONICS CORP·Filed 2006·Granted Jun 8, 2010·0 cites·15 claims
- 0229US2007066187A1Chemical mechanical polishing device including a polishing pad and cleaning method thereof and method for planarizationYANG CHIH-CHIANG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →