Inventor · disambiguated record
Chunhai Ji
Also filed as: JI CHUNHAI
7 granted patents·5 pending applications·93 citations·filing 2012–2023
85Inventor score
Top patents by PatentIndex Score
12 records- 0196US9644271B1Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabricationLAM RES CORP·Filed 2016·Granted May 9, 2017·21 cites·24 claims
- 0295US9023731B2Carbon deposition-etch-ash gap fill processNOVELLUS SYSTEMS INC·Filed 2013·Granted May 5, 2015·36 cites·20 claims
- 0394US9362133B2Method for forming a mask by etching conformal film on patterned ashable hardmaskLAM RES CORP·Filed 2013·Granted Jun 7, 2016·19 cites·17 claims
- 0489US9589799B2High selectivity and low stress carbon hardmask by pulsed low frequency RF powerLAM RES CORP·Filed 2014·Granted Mar 7, 2017·10 cites·17 claims
- 0585US10192759B2Image reversal with AHM gap fill for multiple patterningLAM RES CORP·Filed 2016·Granted Jan 29, 2019·4 cites·16 claims
- 0676US10475627B2Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignitionLAM RES CORP·Filed 2016·Granted Nov 12, 2019·3 cites·18 claims
- 0753US9941113B2Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabricationLAM RES CORP·Filed 2017·Granted Apr 10, 2018·0 cites·24 claims
- 0853US2025308885A1Hydrogen reduction in amorphous carbon filmsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0950US2025022740A1System for monitoring performance of electrostatic chucks in substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1049US2025140530A1In-situ back side plasma treatment for residue removal from substratesLAM RES CORP·Filed 2022·Application pending·0 cites
- 1145US2022267900A1Chamber-accumulation extension via in-situ passivationLAM RES CORP·Filed 2020·Application pending·0 cites
- 1238US2012258261A1Increasing etch selectivity of carbon films with lower absorption co-efficient and stressREDDY SIRISH·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Chunhai Ji files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →