Inventor · disambiguated record
Chi-Chun Liu
Also filed as: LIU CHI · LIU CHI-CHUN
109 granted patents·8 pending applications·361 citations·filing 2012–2023
99Inventor score
Top patents by PatentIndex Score
117 records- 0198US9576817B1Pattern decomposition for directed self assembly patterns templated by sidewall image transferIBM·Filed 2015·Granted Feb 21, 2017·40 cites·17 claims
- 0297US9831324B1Self-aligned inner-spacer replacement process using implantationIBM·Filed 2016·Granted Nov 28, 2017·14 cites·11 claims
- 0397US8853085B1Grapho-epitaxy DSA process with dimension control of template patternIBM·Filed 2013·Granted Oct 7, 2014·47 cites·20 claims
- 0496US11610780B2Alternating hardmasks for tight-pitch line formationTESSERA LLC·Filed 2021·Granted Mar 21, 2023·2 cites·20 claims
- 0596US9536750B1Method for fin formation with a self-aligned directed self-assembly process and cut-last schemeIBM·Filed 2015·Granted Jan 3, 2017·14 cites·8 claims
- 0696US9368350B1Tone inverted directed self-assembly (DSA) fin patterningIBM·Filed 2015·Granted Jun 14, 2016·12 cites·20 claims
- 0795US9632408B1Graphoepitaxy directed self assemblyIBM·Filed 2016·Granted Apr 25, 2017·15 cites·20 claims
- 0894US10461154B1Bottom isolation for nanosheet transistors on bulk substrateIBM·Filed 2018·Granted Oct 29, 2019·9 cites·16 claims
- 0994US10256320B1Vertical field-effect-transistors having a silicon oxide layer with controlled thicknessIBM·Filed 2017·Granted Apr 9, 2019·11 cites·20 claims
- 1094US10157789B2Via formation using sidewall image transfer process to define lateral dimensionIBM·Filed 2016·Granted Dec 18, 2018·12 cites·11 claims
- 1194US10103022B2Alternating hardmasks for tight-pitch line formationIBM·Filed 2017·Granted Oct 16, 2018·8 cites·20 claims
- 1294US9768059B1High-chi block copolymers for interconnect structures by directed self-assemblyIBM·Filed 2016·Granted Sep 19, 2017·12 cites·32 claims
- 1393US9490168B1Via formation using sidewall image transfer process to define lateral dimensionIBM·Filed 2015·Granted Nov 8, 2016·10 cites·9 claims
- 1493US8859433B2DSA grapho-epitaxy process with etch stop materialIBM·Filed 2013·Granted Oct 14, 2014·21 cites·25 claims
- 1593US8771929B2Tone inversion of self-assembled self-aligned structuresGUILLORN MICHAEL A·Filed 2012·Granted Jul 8, 2014·13 cites·25 claims
- 1691US10410875B2Alternating hardmasks for tight-pitch line formationIBM·Filed 2017·Granted Sep 10, 2019·4 cites·20 claims
- 1791US10199464B2Techniques for VFET top source/drain epitaxyIBM·Filed 2017·Granted Feb 5, 2019·6 cites·16 claims
- 1891US9852260B2Method and recording medium of reducing chemoepitaxy directed self-assembled defectsIBM·Filed 2016·Granted Dec 26, 2017·6 cites·20 claims
- 1989US10892328B2Source/drain extension regions and air spacers for nanosheet field-effect transistor structuresIBM·Filed 2019·Granted Jan 12, 2021·5 cites·20 claims
- 2089US8715917B2Simultaneous photoresist development and neutral polymer layer formationIBM·Filed 2012·Granted May 6, 2014·8 cites·20 claims
- 2188US10090378B1Efficient metal-insulator-metal capacitorIBM·Filed 2017·Granted Oct 2, 2018·4 cites·5 claims
- 2287US11600325B2Non volatile resistive memory logic deviceIBM·Filed 2020·Granted Mar 7, 2023·2 cites·19 claims
- 2387US11031248B2Alternating hardmasks for tight-pitch line formationTESSERA INC·Filed 2019·Granted Jun 8, 2021·2 cites·21 claims
- 2487US10755976B2Field effect device with reduced capacitance and resistance in source/drain contacts at reduced gate pitchIBM·Filed 2019·Granted Aug 25, 2020·3 cites·20 claims
- 2587US10475905B2Techniques for vertical FET gate length controlIBM·Filed 2018·Granted Nov 12, 2019·4 cites·18 claims
- 2687US10374034B1Undercut control in isotropic wet etch processesIBM·Filed 2018·Granted Aug 6, 2019·5 cites·20 claims
- 2786US10114921B2Method and recording medium of reducing chemoepitaxy directed self-assembled defectsIBM·Filed 2017·Granted Oct 30, 2018·3 cites·20 claims
- 2885US12322601B2Alternating hardmasks for tight-pitch line formationADEIA SEMICONDUCTOR SOLUTIONS LLC·Filed 2023·Granted Jun 3, 2025·0 cites·22 claims
- 2985US11670580B2Subtractive via etch for MIMCAPIBM·Filed 2021·Granted Jun 6, 2023·1 cites·17 claims
- 3085US10381267B2Field effect device with reduced capacitance and resistance in source/drain contacts at reduced gate pitchIBM·Filed 2017·Granted Aug 13, 2019·3 cites·8 claims
- 3185US10242881B2Self-aligned single dummy fin cut with tight pitchIBM·Filed 2017·Granted Mar 26, 2019·3 cites·10 claims
- 3285US9738765B2Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymersIBM·Filed 2015·Granted Aug 22, 2017·4 cites·31 claims
- 3384US10059820B2Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymersIBM·Filed 2017·Granted Aug 28, 2018·3 cites·21 claims
- 3483US10580652B2Alternating hardmasks for tight-pitch line formationIBM·Filed 2018·Granted Mar 3, 2020·2 cites·20 claims
- 3583US10134762B2Embedded security circuit formed by directed self-assemblyIBM·Filed 2017·Granted Nov 20, 2018·2 cites·20 claims
- 3683US9810980B1Graphoepitaxy directed self assemblyIBM·Filed 2017·Granted Nov 7, 2017·3 cites·17 claims
- 3783US8959651B2Protecting privacy data in MapReduce systemIBM·Filed 2013·Granted Feb 17, 2015·8 cites·14 claims
- 3882US8921030B2Tone inversion of self-assembled self-aligned structuresGUILLORN MICHAEL A·Filed 2012·Granted Dec 30, 2014·4 cites·25 claims
- 3981US11239077B2Litho-etch-litho-etch with self-aligned blocksIBM·Filed 2019·Granted Feb 1, 2022·2 cites·20 claims
- 4081US11139242B2Via-to-metal tip connections in multi-layer chipsIBM·Filed 2019·Granted Oct 5, 2021·2 cites·14 claims
- 4181US9917106B2Embedded security circuit formed by directed self-assemblyIBM·Filed 2015·Granted Mar 13, 2018·2 cites·10 claims
- 4281US9372886B2Data filtering in the internet of thingsIBM·Filed 2013·Granted Jun 21, 2016·7 cites·13 claims
- 4380US11120458B2Group-based sequential recommendationsIBM·Filed 2018·Granted Sep 14, 2021·2 cites·17 claims
- 4479US10833180B2Self-aligned tunneling field effect transistorsIBM·Filed 2018·Granted Nov 10, 2020·2 cites·20 claims
- 4579US9947548B2Self-aligned single dummy fin cut with tight pitchIBM·Filed 2016·Granted Apr 17, 2018·2 cites·13 claims
- 4679US9911603B2Pattern decomposition for directed self assembly patterns templated by sidewall image transferIBM·Filed 2017·Granted Mar 6, 2018·2 cites·19 claims
- 4778US10312103B2Alternating hardmasks for tight-pitch line formationIBM·Filed 2017·Granted Jun 4, 2019·1 cites·15 claims
- 4877US10606980B2Method and recording medium of reducing chemoepitaxy directed self-assembled defectsIBM·Filed 2018·Granted Mar 31, 2020·1 cites·20 claims
- 4975US10651266B2Efficient metal-insulator-metal capacitorTESSERA INC·Filed 2018·Granted May 12, 2020·1 cites·17 claims
- 5075US9659824B2Graphoepitaxy directed self-assembly process for semiconductor fin formationIBM·Filed 2015·Granted May 23, 2017·2 cites·20 claims
Showing the top 50 of 117 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →