Inventor · disambiguated record
Chi-Ming Yang
Also filed as: YANG CHI · YANG CHI-MING
182 granted patents·45 pending applications·618 citations·filing 1982–2025
99Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD144TAIWAN SEMICONDUCTOR MFG20YEH MING-HSI7HWANG CHIH-HONG4CHANG CHUN-LIN3
Top patents by PatentIndex Score
227 records- 0198US11705332B2Photoresist layer surface treatment, cap layer, and method of forming photoresist patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 18, 2023·9 cites·20 claims
- 0298US9859139B23D IC bump height metrology APCTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 2, 2018·17 cites·20 claims
- 0397US12007694B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 11, 2024·4 cites·20 claims
- 0497US11402761B2Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 2, 2022·4 cites·20 claims
- 0597US11086237B2Extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 10, 2021·4 cites·20 claims
- 0696US12085585B2Particle image velocimetry of extreme ultraviolet lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·2 cites·20 claims
- 0796US11029324B2Particle image velocimetry of extreme ultraviolet lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 8, 2021·7 cites·20 claims
- 0896US10527926B1Pressurized tin collection bucket with in-line draining mechanismTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 7, 2020·8 cites·20 claims
- 0995US12057315B2Photoresist layer surface treatment, cap layer, and method of forming photoresist patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 6, 2024·2 cites·20 claims
- 1095US11822237B2Method of manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 21, 2023·3 cites·20 claims
- 1195US11680958B2Particle image velocimetry of extreme ultraviolet lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 20, 2023·3 cites·6 claims
- 1295US8623468B2Methods of fabricating metal hard masksLIN SU-HORNG·Filed 2012·Granted Jan 7, 2014·49 cites·18 claims
- 1394US12055865B2Extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 6, 2024·2 cites·20 claims
- 1494US11726405B2Photoresist for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 15, 2023·2 cites·20 claims
- 1594US10875060B2Method and apparatus for removing debris from collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·8 cites·20 claims
- 1694US8404572B2Multi-zone temperature control for semiconductor waferCHANG CHUN-LIN·Filed 2009·Granted Mar 26, 2013·40 cites·20 claims
- 1794US8088685B2Integration of bottom-up metal film depositionLIN SIMON SU-HORNG·Filed 2010·Granted Jan 3, 2012·23 cites·20 claims
- 1893US12159787B2Method of manufacturing a semiconductor device and pattern formation methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 3, 2024·2 cites·20 claims
- 1993US12135501B2Method of manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 5, 2024·1 cites·20 claims
- 2093US10747119B2Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 18, 2020·4 cites·20 claims
- 2192US10065288B2Chemical mechanical polishing (CMP) platform for local profile controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 4, 2018·10 cites·20 claims
- 2292US8119473B2High temperature anneal for aluminum surface protectionHUANG KUO BIN·Filed 2009·Granted Feb 21, 2012·30 cites·15 claims
- 2392US8105851B1Nitride film wet strippingKU SHAO-YEN·Filed 2010·Granted Jan 31, 2012·19 cites·19 claims
- 2491US10512147B1Extreme ultraviolet radiation source and droplet catcher thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 17, 2019·4 cites·20 claims
- 2591US8871639B2Semiconductor devices and methods of manufacture thereofTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 28, 2014·9 cites·20 claims
- 2690US10880981B2Collector pellicleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·4 cites·20 claims
- 2790US10678138B2Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 9, 2020·4 cites·20 claims
- 2890US10113233B2Multi-zone temperature control for semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 30, 2018·6 cites·14 claims
- 2990US2025341775A1Photoresist for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3089US11125968B2Optical moduleDELTA ELECTRONICS INC·Filed 2019·Granted Sep 21, 2021·4 cites·11 claims
- 3189US9869018B2Solid precursor delivery method using liquid solvent for thin film depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 16, 2018·3 cites·20 claims
- 3288US11652007B2Metrology methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 16, 2023·3 cites·20 claims
- 3388US8357574B2Method of fabricating epitaxial structuresTAIWAN SEMICONDUCTOR MFG·Filed 2010·Granted Jan 22, 2013·9 cites·20 claims
- 3488US7301430B1High voltage transformer for controlling inductance leakageLIEN CHANG ELECTRONIC ENTPR CO·Filed 2006·Granted Nov 27, 2007·19 cites·21 claims
- 3587US12321100B2Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jun 3, 2025·0 cites·20 claims
- 3687US8616821B2Integrated apparatus to assure wafer quality and manufacturabilityKU SHAO-YEN·Filed 2010·Granted Dec 31, 2013·12 cites·5 claims
- 3787US2025334606A1Particle image velocimetry of extreme ultraviolet lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3887US2025291257A1Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3986US12436164B2Particle image velocimetry of extreme ultraviolet lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Oct 7, 2025·0 cites·20 claims
- 4086US12044966B2Photoresist for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 23, 2024·0 cites·20 claims
- 4186US9864270B2Pellicle and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 9, 2018·3 cites·20 claims
- 4286US8657963B2In-situ backside cleaning of semiconductor substrateYEH MING-HSI·Filed 2011·Granted Feb 25, 2014·8 cites·13 claims
- 4386US8541270B2Finlike structures and methods of making sameYEH MING-HSI·Filed 2011·Granted Sep 24, 2013·7 cites·20 claims
- 4485US9741585B1Reactive radical treatment for polymer removal and workpiece cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 22, 2017·4 cites·20 claims
- 4585US8709528B2Wafer processing method and system using multi-zone chuckCHENG NAI-HAN·Filed 2011·Granted Apr 29, 2014·6 cites·20 claims
- 4685US6030863AGermanium and arsenic double implanted pre-amorphization process for salicide technologyTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Feb 29, 2000·77 cites·24 claims
- 4785US2024377732A1Photoresist for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4885US2024385516A1Photoresist for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4984US11204556B2Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 21, 2021·1 cites·20 claims
- 5084US10859928B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 8, 2020·2 cites·20 claims
Showing the top 50 of 227 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →