Inventor · disambiguated record
Coby Scott Grove
Also filed as: GROVE COBY · GROVE COBY S · GROVE COBY SCOTT
6 granted patents·2 pending applications·52 citations·filing 1998–2024
76Inventor score
Top patents by PatentIndex Score
8 records- 0176US6930046B2Single workpiece processing systemSEMITOOL INC·Filed 2003·Granted Aug 16, 2005·20 cites·82 claims
- 0275US12476120B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2024·Granted Nov 18, 2025·0 cites·20 claims
- 0365US11935771B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 0461US6030208AThermal processorSEMITOOL INC·Filed 1998·Granted Feb 29, 2000·32 cites·21 claims
- 0550US11984335B2FOUP or cassette storage for hybrid substrate bonding systemAPPLIED MATERIALS INC·Filed 2021·Granted May 14, 2024·0 cites·19 claims
- 0645US11935770B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 0740US2007000527A1Workpiece support for use in a process vessel and system for treating microelectronic workpiecesAEGERTER BRIAN K·Filed 2005·Application pending·0 cites
- 0831US2004109797A1Ozone destructorFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →