Inventor · disambiguated record
D. Jeffrey Lischer
Also filed as: LISCHER D JEFFREY
22 granted patents·7 pending applications·476 citations·filing 1996–2024
94Inventor score
Files withAPPLIED MATERIALS INC11MKS INSTR INC4VARIAN SEMICONDUCTOR EQUIPMENT4VARIAN SEMICONDUCTOR EQUIPMENT ASS INC4BUFF JAMES S1
Top patents by PatentIndex Score
29 records- 0195US5868159APressure-based mass flow controllerMKS INSTR INC·Filed 1996·Granted Feb 9, 1999·228 cites·15 claims
- 0294US9287148B1Dynamic heating method and system for wafer processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·17 cites·15 claims
- 0391US5966499ASystem for delivering a substantially constant vapor flow to a chemical process reactorMKS INSTR INC·Filed 1997·Granted Oct 12, 1999·115 cites·39 claims
- 0489US7528392B2Techniques for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 5, 2009·12 cites·27 claims
- 0584US2024266231A1Cylindric decomposition for efficient mitigation of substrate deformation with film deposition and ion implantationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0684US2024266233A1Influence function-based mitigation of substrate deformation with film deposition and ion implantationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0784US2024266230A1Optimized film deposition and ion implantation for mitigation of stress and deformation in substratesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0884US2024266174A1Mitigation of saddle deformation of substrates using film deposition and edge ion implantationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0983US6105436ACapacitive pressure transducer with improved electrode supportMKS INSTR INC·Filed 1999·Granted Aug 22, 2000·57 cites·32 claims
- 1082US6993973B2Contaminant deposition control baffle for a capacitive pressure transducerMKS INSTR INC·Filed 2003·Granted Feb 7, 2006·33 cites·22 claims
- 1176US9633886B2Hybrid thermal electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·2 cites·19 claims
- 1272US8003956B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 23, 2011·3 cites·18 claims
- 1371US7863520B2Interfacing two insulation parts in high voltage environmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·2 cites·5 claims
- 1469US11545375B2Hybrid control system for workpiece heatingAPPLIED MATERIALS INC·Filed 2019·Granted Jan 3, 2023·1 cites·20 claims
- 1568US8466431B2Techniques for improving extracted ion beam quality using high-transparency electrodesBUFF JAMES S·Filed 2009·Granted Jun 18, 2013·3 cites·20 claims
- 1667US9685303B2Apparatus for heating and processing a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jun 20, 2017·1 cites·17 claims
- 1758US2025140567A1Multi-parameter implantation for managing wafer distortionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1857US11473978B2Enhanced substrate temperature measurement apparatus, system and methodAPPLIED MATERIALS INC·Filed 2019·Granted Oct 18, 2022·0 cites·15 claims
- 1957US8143604B2Insulator system for a terminal structure of an ion implantation systemLOW RUSSELL·Filed 2006·Granted Mar 27, 2012·2 cites·14 claims
- 2053US12278124B2Model-based controlled load lock pumping schemeAPPLIED MATERIALS INC·Filed 2021·Granted Apr 15, 2025·0 cites·18 claims
- 2151US8455760B2Interfacing two insulation parts in high voltage environmentLOW RUSSELL J·Filed 2011·Granted Jun 4, 2013·0 cites·10 claims
- 2249US11557496B2Load lock with integrated featuresAPPLIED MATERIALS INC·Filed 2020·Granted Jan 17, 2023·0 cites·15 claims
- 2347US11543296B2Method and apparatus for calibration of substrate temperature using pyrometerAPPLIED MATERIALS INC·Filed 2019·Granted Jan 3, 2023·0 cites·20 claims
- 2447US2009122458A1Embossed electrostatic chuckVARIAN SEMICONDUCTOR EPUIPMENT·Filed 2008·Application pending·0 cites
- 2544US9633875B2Apparatus for improving temperature uniformity of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·0 cites·20 claims
- 2641US2020381271A1System and apparatus for enhanced substrate heating and rapid substrate coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2739US8672311B2Method of cooling textured workpieces with an electrostatic chuckSTONE DALE K·Filed 2010·Granted Mar 18, 2014·0 cites·13 claims
- 2838US10443934B2Substrate handling and heating systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Oct 15, 2019·0 cites·20 claims
- 2935US8933335B2Current lead with a configuration to reduce heat load transfer in an alternating electrical current environmentCITVER GREGORY·Filed 2011·Granted Jan 13, 2015·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →