Inventor · disambiguated record
Daksh Agarwal
Also filed as: AGARWAL DAKSH
2 granted patents·5 pending applications·1 citations·filing 2017–2023
32Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0163US10847368B2EUV resist patterning using pulsed plasmaAPPLIED MATERIALS INC·Filed 2017·Granted Nov 24, 2020·1 cites·18 claims
- 0263US2024047195A1Delayed pulsing for plasma processing of wafersAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0351US2025277148A1Organochloride etch with passivation and profile controlLAM RES CORP·Filed 2023·Application pending·0 cites
- 0448US11817312B2Delayed pulsing for plasma processing of wafersAPPLIED MATERIALS INC·Filed 2018·Granted Nov 14, 2023·0 cites·13 claims
- 0548US2024429063A1Silicon etch with organochlorideLAM RES CORP·Filed 2022·Application pending·0 cites
- 0647US2025095964A1Method to control etch profile by rf pulsingLAM RES CORP·Filed 2022·Application pending·0 cites
- 0744US2023230807A1Control of mask cdLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →