Inventor · disambiguated record
Daniel Nathan Burbank
Also filed as: BURBANK DANIEL NATHAN
12 granted patents·2 pending applications·12 citations·filing 2013–2022
85Inventor score
Technology areasG03F
Top patents by PatentIndex Score
14 records- 0188US9632434B2Reticle cooling system in a lithographic apparatusASML HOLDING NV·Filed 2015·Granted Apr 25, 2017·3 cites·20 claims
- 0281US9632433B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2013·Granted Apr 25, 2017·2 cites·9 claims
- 0378US9766557B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted Sep 19, 2017·1 cites·13 claims
- 0476US10761435B2Reticle clamping deviceASML HOLDING NV·Filed 2018·Granted Sep 1, 2020·2 cites·20 claims
- 0574US11204558B2Particle suppression systems and methodsASML NETHERLANDS BV·Filed 2018·Granted Dec 21, 2021·1 cites·21 claims
- 0672US9740112B2Patterning device support and lithographic apparatusASML HOLDING NV·Filed 2013·Granted Aug 22, 2017·2 cites·27 claims
- 0765US9377700B2Determining position and curvature information directly from a surface of a patterning deviceASML HOLDING NV·Filed 2013·Granted Jun 28, 2016·1 cites·21 claims
- 0861US9977351B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted May 22, 2018·0 cites·14 claims
- 0953US2024419088A1Method and apparatus for lithographic imagingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1049US10585359B2Membrane assembly and particle trapASML HOLDING NV·Filed 2017·Granted Mar 10, 2020·0 cites·17 claims
- 1148US9910368B2Patterning device manipulating system and lithographic apparatusesASML NETHERLANDS BV·Filed 2013·Granted Mar 6, 2018·0 cites·47 claims
- 1246US2015192856A1Heating and Cooling Systems in a Lithographic ApparatusASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 1344US10423081B2Reticle cooling by non-uniform gas flowASML HOLDING NV·Filed 2015·Granted Sep 24, 2019·0 cites·24 claims
- 1443US10031428B2Gas flow optimization in reticle stage environmentASML NETHERLANDS BV·Filed 2014·Granted Jul 24, 2018·0 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →