Inventor · disambiguated record
David Z. Chen
Also filed as: CHEN DAVID · CHEN DAVID Z · CHEN DAVID ZHEHAO
5 granted patents·55 citations·filing 1997–2013
76Inventor score
Files withPOPPE STEVE2ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI1APLEX INC1APPLIED MATERIALS INC1
Top patents by PatentIndex Score
5 records- 0190US7155319B2Closed loop control on liquid delivery system ECP slim cellAPPLIED MATERIALS INC·Filed 2005·Granted Dec 26, 2006·25 cites·27 claims
- 0278US8652259B2Scalable, high-throughput, multi-chamber epitaxial reactor for silicon depositionPOPPE STEVE·Filed 2009·Granted Feb 18, 2014·5 cites·18 claims
- 0362US5957764AModular wafer polishing apparatus and methodAPLEX INC·Filed 1997·Granted Sep 28, 1999·25 cites·23 claims
- 0449US8845809B2Scalable, high-throughput, multi-chamber epitaxial reactor for silicon depositionPOPPE STEVE·Filed 2009·Granted Sep 30, 2014·0 cites·7 claims
- 0537US9443715B2Method and device for measuring temperature of substrate in vacuum processing apparatusADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2013·Granted Sep 13, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →