Inventor · disambiguated record
David Robert Evans
Also filed as: EVANS DAVID · EVANS DAVID R · EVANS DAVID ROBERT
11 granted patents·1 pending application·27 citations·filing 1988–2024
87Inventor score
Top patents by PatentIndex Score
12 records- 0196US9888554B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2016·Granted Feb 6, 2018·9 cites·14 claims
- 0290US11347154B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2019·Granted May 31, 2022·3 cites·21 claims
- 0387US10362664B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2018·Granted Jul 23, 2019·2 cites·10 claims
- 0485US9301382B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceCymer LLC·Filed 2013·Granted Mar 29, 2016·6 cites·20 claims
- 0584US9795023B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 17, 2017·3 cites·15 claims
- 0684US2025085643A1Cleaning a structure surface in an euv chamberASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0776US12189313B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2022·Granted Jan 7, 2025·0 cites·16 claims
- 0875US10237960B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·1 cites·19 claims
- 0974US10681795B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2019·Granted Jun 9, 2020·1 cites·20 claims
- 1067US10477662B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2019·Granted Nov 12, 2019·0 cites·20 claims
- 1165US11013096B2System, method and apparatus for target material debris cleaning of EUV vessel and EUV collectorASML NETHERLANDS BV·Filed 2019·Granted May 18, 2021·0 cites·13 claims
- 1225US4866728AElectric discharge apparatusJECO2 LASERS INC·Filed 1988·Granted Sep 12, 1989·2 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →