Inventor · disambiguated record
Dale A. Harrison
Also filed as: HARRISON DALE · HARRISON DALE A
45 granted patents·7 pending applications·834 citations·filing 1999–2025
98Inventor score
Files withMETROSOL INC19VUV ANALYTICS INC11N & K TECHNOLOGY INC6JORDAN VALLEY SEMICONDUCTORS4WALSH PHILLIP4
Top patents by PatentIndex Score
52 records- 0196US8054453B2Broad band referencing reflectometerJORDAN VALLEY SEMICONDUCTORS·Filed 2010·Granted Nov 8, 2011·15 cites·20 claims
- 0295US7391030B2Broad band referencing reflectometerMETROSOL INC·Filed 2007·Granted Jun 24, 2008·19 cites·82 claims
- 0395US7189973B2Vacuum ultraviolet reflectometer integrated with processing systemMETROSOL INC·Filed 2006·Granted Mar 13, 2007·26 cites·32 claims
- 0495US7126131B2Broad band referencing reflectometerMETROSOL INC·Filed 2004·Granted Oct 24, 2006·52 cites·38 claims
- 0594US9116158B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2013·Granted Aug 25, 2015·13 cites·12 claims
- 0694US7342235B1Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Mar 11, 2008·32 cites·42 claims
- 0794US7271394B2Vacuum ultraviolet reflectometer having collimated beamMETROSOL INC·Filed 2006·Granted Sep 18, 2007·19 cites·43 claims
- 0894US7067818B2Vacuum ultraviolet reflectometer system and methodMETROSOL INC·Filed 2003·Granted Jun 27, 2006·67 cites·70 claims
- 0994US6392756B1Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrateN & K TECHNOLOGY INC·Filed 1999·Granted May 21, 2002·123 cites·56 claims
- 1092US10641749B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2019·Granted May 5, 2020·3 cites·11 claims
- 1192US7684037B2Spectrometer with collimated input lightMETROSOL INC·Filed 2007·Granted Mar 23, 2010·28 cites·30 claims
- 1292US7485869B2Prism spectrometerMETROSOL INC·Filed 2007·Granted Feb 3, 2009·28 cites·36 claims
- 1391US8119991B2Method and apparatus for accurate calibration of VUV reflectometerHARRISON DALE A·Filed 2010·Granted Feb 21, 2012·12 cites·12 claims
- 1489US7446876B2Vacuum ultra-violet reflectometer with stray light correctionMETROSOL INC·Filed 2006·Granted Nov 4, 2008·11 cites·40 claims
- 1589US7282703B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Oct 16, 2007·17 cites·17 claims
- 1688US9976996B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted May 22, 2018·2 cites·22 claims
- 1787US7026626B2Semiconductor processing techniques utilizing vacuum ultraviolet reflectometerMETROSOL INC·Filed 2003·Granted Apr 11, 2006·38 cites·32 claims
- 1887US6710865B2Method of inferring optical parameters outside of a measurement spectral rangeN & K TECHNOLOGY INC·Filed 2001·Granted Mar 23, 2004·39 cites·18 claims
- 1987US6091485AMethod and apparatus for optically determining physical parameters of underlayersN & K TECHNOLOGY INC·Filed 1999·Granted Jul 18, 2000·78 cites·25 claims
- 2086US7579601B2Spectrometer with moveable detector elementMETROSOL INC·Filed 2007·Granted Aug 25, 2009·16 cites·34 claims
- 2186US7511265B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Mar 31, 2009·11 cites·41 claims
- 2285US6379014B1Graded anti-reflective coatings for photolithographyN & K TECHNOLOGY INC·Filed 2000·Granted Apr 30, 2002·26 cites·12 claims
- 2384US10677767B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2018·Granted Jun 9, 2020·3 cites·20 claims
- 2484US7394551B2Vacuum ultraviolet referencing reflectometerMETROSOL INC·Filed 2003·Granted Jul 1, 2008·25 cites·28 claims
- 2584US6327035B1Method and apparatus for optically examining miniature patternsN & K TECHNOLOGY INC·Filed 1999·Granted Dec 4, 2001·53 cites·26 claims
- 2681US6594025B2Method of monitoring thin-film processes and metrology tool thereofN & K TECHNOLOGY INC·Filed 2001·Granted Jul 15, 2003·24 cites·22 claims
- 2777US7804059B2Method and apparatus for accurate calibration of VUV reflectometerJORDAN VALLEY SEMICONDUCTORS·Filed 2004·Granted Sep 28, 2010·12 cites·30 claims
- 2876US8867041B2Optical vacuum ultra-violet wavelength nanoimprint metrologyWALSH PHILLIP·Filed 2012·Granted Oct 21, 2014·3 cites·14 claims
- 2975US7399975B2Method and apparatus for performing highly accurate thin film measurementsMETROSOL INC·Filed 2004·Granted Jul 15, 2008·19 cites·26 claims
- 3073US9465015B2Vacuum ultraviolet absorption spectroscopy system and methodVUVA ANALYTICS INC·Filed 2014·Granted Oct 11, 2016·1 cites·18 claims
- 3173US8014000B2Broad band referencing reflectometerJORDAN VALLEY SEMICONDUCTORS·Filed 2009·Granted Sep 6, 2011·3 cites·20 claims
- 3271US8867130B1Polarization device for vacuum ultraviolet or shorter wavelengthsHARRISON DALE A·Filed 2011·Granted Oct 21, 2014·3 cites·20 claims
- 3368US7663747B2Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Feb 16, 2010·2 cites·14 claims
- 3468US7622310B2Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Nov 24, 2009·2 cites·67 claims
- 3567US10338040B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Jul 2, 2019·0 cites·9 claims
- 3667US9891197B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Feb 13, 2018·0 cites·26 claims
- 3767US8153987B2Automated calibration methodology for VUV metrology systemHURST JEFFREY B·Filed 2009·Granted Apr 10, 2012·4 cites·18 claims
- 3866US9696286B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Jul 4, 2017·0 cites·19 claims
- 3966US2025321182A1Flow Cells And Methods For Analyzing Liquids At Vacuum Ultraviolet (VUV) WavelengthsVUV ANALYTICS INC·Filed 2024·Application pending·0 cites
- 4066US2025347666A1Spectroscopy Systems And Methods For Analyzing Liquids At Vacuum Ultraviolet (VUV) Wavelengths With Enhanced SensitivityVUV ANALYTICS INC·Filed 2024·Application pending·0 cites
- 4164US7663097B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2007·Granted Feb 16, 2010·4 cites·82 claims
- 4262US2025321209A1Spectroscopy Systems, Flow Cells And Methods For Analyzing Liquids At Vacuum Ultraviolet (VUV) WavelengthsVUV ANALYTICS INC·Filed 2025·Application pending·0 cites
- 4356US9310292B2Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopyVUVA ANALYTICS INC·Filed 2014·Granted Apr 12, 2016·0 cites·14 claims
- 4455US10366113B2Method and system for generating a geocode trie and facilitating reverse geocode lookupsTWITTER INC·Filed 2014·Granted Jul 30, 2019·1 cites·20 claims
- 4551US11550826B2Method and system for generating a geocode trie and facilitating reverse geocode lookupsTWITTER INC·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 4651US8773662B2Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopyWALSH PHILLIP·Filed 2011·Granted Jul 8, 2014·0 cites·17 claims
- 4750US2009002711A1Broad band referencing reflectometerMETROSOL INC·Filed 2008·Application pending·0 cites
- 4847US2010277741A1Combined optical metrology techniquesJORDAN VALLEY SEMICONDUCTORS·Filed 2010·Application pending·0 cites
- 4945US2008246951A1Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-piecesWALSH PHILLIP·Filed 2008·Application pending·0 cites
- 5043US10302607B2Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatographyVUV ANALYTICS INC·Filed 2016·Granted May 28, 2019·0 cites·29 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Dale A. Harrison files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →