Inventor · disambiguated record
David A. Roberts
Also filed as: ROBERTS DAVID A · ROBERTS DAVID ALLEN
42 granted patents·3 pending applications·2,199 citations·filing 1986–2025
99Inventor score
Top patents by PatentIndex Score
45 records- 0198US6238734B1Liquid precursor mixtures for deposition of multicomponent metal containing materialsAIR PROD & CHEM·Filed 1999·Granted May 29, 2001·570 cites·11 claims
- 0295US5204141ADeposition of silicon dioxide films at temperatures as low as 100 degree c. by lpcvd using organodisilane sourcesAIR PROD & CHEM·Filed 1991·Granted Apr 20, 1993·151 cites·22 claims
- 0392US6869876B2Process for atomic layer deposition of metal filmsAIR PROD & CHEM·Filed 2002·Granted Mar 22, 2005·71 cites·30 claims
- 0492US4992306ADeposition of silicon dioxide and silicon oxynitride films using azidosilane sourcesAIR PRODUCTS ABD CHEMICALS INC·Filed 1990·Granted Feb 12, 1991·127 cites·25 claims
- 0591US5874368ASilicon nitride from bis(tertiarybutylamino)silaneAIR PROD & CHEM·Filed 1997·Granted Feb 23, 1999·186 cites·8 claims
- 0691US5322712AProcess for improved quality of CVD copper filmsAIR PROD & CHEM·Filed 1993·Granted Jun 21, 1994·72 cites·7 claims
- 0791US5028724ASynthesis of volatile fluorinated and non-fluorinated metal-beta-ketonate and metal-beta-ketoiminato complexesAIR PROD & CHEM·Filed 1990·Granted Jul 2, 1991·38 cites·43 claims
- 0890US6818783B2Volatile precursors for deposition of metals and metal-containing filmsAIR PROD & CHEM·Filed 2002·Granted Nov 16, 2004·31 cites·36 claims
- 0990US6526824B2High purity chemical container with external level sensor and liquid sumpAIR PROD & CHEM·Filed 2001·Granted Mar 4, 2003·69 cites·18 claims
- 1090US5976991ADeposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silaneAIR PROD & CHEM·Filed 1998·Granted Nov 2, 1999·101 cites·9 claims
- 1189US6503561B1Liquid precursor mixtures for deposition of multicomponent metal containing materialsAIR PROD & CHEM·Filed 2000·Granted Jan 7, 2003·40 cites·23 claims
- 1285US5298075AFurnace tube cleaning processAIR PROD & CHEM·Filed 1993·Granted Mar 29, 1994·77 cites·5 claims
- 1384US5626775APlasma etch with trifluoroacetic acid and derivativesAIR PROD & CHEM·Filed 1996·Granted May 6, 1997·73 cites·20 claims
- 1481US5221366AEtching agents comprising β-diketone and β-ketoimine ligands and a process for using the sameAIR PROD & CHEM·Filed 1991·Granted Jun 22, 1993·36 cites·13 claims
- 1577US5492736AFluorine doped silicon oxide processAIR PROD & CHEM·Filed 1994·Granted Feb 20, 1996·60 cites·15 claims
- 1677US5094701ACleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the sameAIR PROD & CHEM·Filed 1991·Granted Mar 10, 1992·66 cites·35 claims
- 1776US7119032B2Method to protect internal components of semiconductor processing equipment using layered superlattice materialsAIR PROD & CHEM·Filed 2004·Granted Oct 10, 2006·14 cites·19 claims
- 1876US4904616AMethod of depositing arsine, antimony and phosphine substitutesAIR PROD & CHEM·Filed 1988·Granted Feb 27, 1990·34 cites·23 claims
- 1976US4732584AProcess for the purification of permanent gases using chabazite adsorbentsAIR PROD & CHEM·Filed 1987·Granted Mar 22, 1988·29 cites·7 claims
- 2075US6500499B1Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursorsAIR PROD & CHEM·Filed 2000·Granted Dec 31, 2002·14 cites·18 claims
- 2173US4747854ASelective chromatographic process using an ion-exchanged, dehydrated chabazite adsorbentAIR PROD & CHEM·Filed 1987·Granted May 31, 1988·26 cites·6 claims
- 2272US7078358B2Low VOC cleanroom cleaning wipeAIR PROD & CHEM·Filed 2001·Granted Jul 18, 2006·10 cites·18 claims
- 2372US6913029B2Multiple contents container assembly for ultrapure solvent purgingAIR PROD & CHEM·Filed 2004·Granted Jul 5, 2005·8 cites·4 claims
- 2472US2025353865A1Amine adducts of group 2 metallocene precursors for depositon of group 2 metal filmsEreztech LLC·Filed 2025·Application pending·0 cites
- 2571US6837251B1Multiple contents container assembly for ultrapure solvent purgingAIR PROD & CHEM·Filed 2000·Granted Jan 4, 2005·12 cites·22 claims
- 2669US5433975ADeposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogenAIR PROD & CHEM·Filed 1993·Granted Jul 18, 1995·44 cites·17 claims
- 2769US4992299ADeposition of silicon nitride films from azidosilane sourcesAIR PROD & CHEM·Filed 1990·Granted Feb 12, 1991·44 cites·24 claims
- 2868US5213622ACleaning agents for fabricating integrated circuits and a process for using the sameAIR PROD & CHEM·Filed 1991·Granted May 25, 1993·42 cites·7 claims
- 2967US4988640AMethod of doping and implanting using arsine, antimony, and phosphine substitutesAIR PROD & CHEM·Filed 1989·Granted Jan 29, 1991·24 cites·16 claims
- 3066US4744805ASelective adsorption process using an oxidized ion-exchanged dehydrated chabizite adsorbentAIR PROD & CHEM·Filed 1987·Granted May 17, 1988·20 cites·12 claims
- 3164US6534666B1Use of water and acidic water to purify liquid MOCVD precursorsAIR PROD & CHEM·Filed 2001·Granted Mar 18, 2003·5 cites·30 claims
- 3262US6840252B2Multiple contents container assembly for ultrapure solvent purgingAIR PROD & CHEM·Filed 2003·Granted Jan 11, 2005·7 cites·18 claims
- 3358US6096913AProduction of metal-ligand complexesAIR PROD & CHEM·Filed 1999·Granted Aug 1, 2000·7 cites·22 claims
- 3456US7919409B2Materials for adhesion enhancement of copper film on diffusion barriersAIR PROD & CHEM·Filed 2008·Granted Apr 5, 2011·1 cites·11 claims
- 3555US6770254B2Purification of group IVb metal halidesAIR PROD & CHEM·Filed 2002·Granted Aug 3, 2004·2 cites·13 claims
- 3654US5213621AHalogenated carboxylic acid cleaning agents for fabricating integrated circuits and a process for using the sameAIR PROD & CHEM·Filed 1991·Granted May 25, 1993·24 cites·21 claims
- 3753US5288662ALow ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaningAIR PROD & CHEM·Filed 1992·Granted Feb 22, 1994·19 cites·5 claims
- 3852USRE35614EProcess for improved quality of CVD copper filmsAIR PROD & CHEM·Filed 1996·Granted Sep 23, 1997·13 cites·7 claims
- 3949US4713362ASelective zeolitic adsorbent and a method for activation thereofAIR PROD & CHEM·Filed 1986·Granted Dec 15, 1987·10 cites·26 claims
- 4046US7662959B2Quaternary trifluoromethylcyclohexane derivatives for liquid crystalsAIR PROD & CHEM·Filed 2008·Granted Feb 16, 2010·0 cites·6 claims
- 4142US2007193026A1Electron attachment assisted formation of electrical conductorsDONG CHUN CHRISTINE·Filed 2006·Application pending·0 cites
- 4240US5013690AMethod for deposition of silicon films from azidosilane sourcesAIR PROD & CHEM·Filed 1990·Granted May 7, 1991·11 cites·9 claims
- 4339US5062902AFluxing agents comprising β-diketone and β-ketoimine ligands and a process for using the sameAIR PROD & CHEM·Filed 1990·Granted Nov 5, 1991·7 cites·18 claims
- 4438US2002013487A1Volatile precursors for deposition of metals and metal-containing filmsFiled 2001·Application pending·0 cites
- 4535US5009725AFluxing agents comprising β-diketone and β-ketoimine ligands and a process for using the sameAIR PROD & CHEM·Filed 1990·Granted Apr 23, 1991·4 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →