Inventor · disambiguated record
Daping Yao
Also filed as: YAO DAPING
15 granted patents·1 pending application·125 citations·filing 2011–2021
88Inventor score
Top patents by PatentIndex Score
16 records- 0198US9460959B1Methods for pre-cleaning conductive interconnect structuresAPPLIED MATERIALS INC·Filed 2015·Granted Oct 4, 2016·113 cites·18 claims
- 0288US9506145B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2016·Granted Nov 29, 2016·3 cites·20 claims
- 0388US9364871B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 14, 2016·4 cites·11 claims
- 0480US10752990B2Apparatus and methods to remove residual precursor inside gas lines post-depositionAPPLIED MATERIALS INC·Filed 2017·Granted Aug 25, 2020·1 cites·16 claims
- 0575US10600685B2Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt filmAPPLIED MATERIALS INC·Filed 2017·Granted Mar 24, 2020·2 cites·20 claims
- 0670US10453657B2Apparatus for depositing metal films with plasma treatmentAPPLIED MATERIALS INC·Filed 2017·Granted Oct 22, 2019·0 cites·16 claims
- 0767US11628456B2Apparatus for increasing flux from an ampouleAPPLIED MATERIALS INC·Filed 2021·Granted Apr 18, 2023·0 cites·20 claims
- 0867US8664126B2Selective deposition of polymer films on bare silicon instead of oxide surfaceYAO DAPING·Filed 2012·Granted Mar 4, 2014·2 cites·22 claims
- 0965US11133155B2Apparatus for depositing metal films with plasma treatmentAPPLIED MATERIALS INC·Filed 2019·Granted Sep 28, 2021·0 cites·12 claims
- 1059US10640870B2Gas feedthrough assemblyAPPLIED MATERIALS INC·Filed 2017·Granted May 5, 2020·0 cites·20 claims
- 1156US11059061B2Apparatus for increasing flux from an ampouleAPPLIED MATERIALS INC·Filed 2018·Granted Jul 13, 2021·0 cites·29 claims
- 1253US10283345B2Methods for pre-cleaning conductive materials on a substrateAPPLIED MATERIALS INC·Filed 2016·Granted May 7, 2019·0 cites·18 claims
- 1344US9478437B2Methods for repairing low-k dielectrics using carbon plasma immersionYAO DAPING·Filed 2011·Granted Oct 25, 2016·0 cites·20 claims
- 1441US11854794B2Semiconductor cleaning equipment and method for cleaning through vias using the sameNAT CENTER FOR ADVANCED PACKAGING CO LTD·Filed 2018·Granted Dec 26, 2023·0 cites·12 claims
- 1541US8492177B2Methods for quantitative measurement of a plasma immersion processYAO DAPING·Filed 2011·Granted Jul 23, 2013·0 cites·18 claims
- 1636US2016326648A1Apparatus for selectively sealing a gas feedthroughAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →