Inventor · disambiguated record
Deenesh Padhi
Also filed as: PADHI DEENESH
94 granted patents·62 pending applications·1,418 citations·filing 2001–2025
99Inventor score
Top patents by PatentIndex Score
156 records- 0198US9966299B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2016·Granted May 8, 2018·365 cites·19 claims
- 0298US9425078B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2015·Granted Aug 23, 2016·454 cites·22 claims
- 0397US11569257B2Multi-layer stacks for 3D NAND extendabilityAPPLIED MATERIALS INC·Filed 2020·Granted Jan 31, 2023·4 cites·19 claims
- 0497US7572337B2Blocker plate bypass to distribute gases in a chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2005·Granted Aug 11, 2009·43 cites·15 claims
- 0596US9721784B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2014·Granted Aug 1, 2017·29 cites·16 claims
- 0695US8536065B2Ultra high selectivity doped amorphous carbon strippable hardmask development and integrationSEAMONS MARTIN JAY·Filed 2011·Granted Sep 17, 2013·51 cites·17 claims
- 0794US8993454B2Ultra high selectivity doped amorphous carbon strippable hardmask development and integrationAPPLIED MATERIALS INC·Filed 2013·Granted Mar 31, 2015·16 cites·5 claims
- 0893US10700087B2Multi-layer stacks for 3D NAND extendibilityAPPLIED MATERIALS INC·Filed 2018·Granted Jun 30, 2020·8 cites·20 claims
- 0993US7407893B2Liquid precursors for the CVD deposition of amorphous carbon filmsAPPLIED MATERIALS INC·Filed 2005·Granted Aug 5, 2008·33 cites·20 claims
- 1093US6821909B2Post rinse to improve selective deposition of electroless cobalt on copper for ULSI applicationAPPLIED MATERIALS INC·Filed 2002·Granted Nov 23, 2004·62 cites·22 claims
- 1192US10049921B2Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursorLAM RES CORP·Filed 2014·Granted Aug 14, 2018·15 cites·19 claims
- 1291US9646876B2Aluminum nitride barrier layerAPPLIED MATERIALS INC·Filed 2015·Granted May 9, 2017·9 cites·10 claims
- 1390US7189658B2Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profileAPPLIED MATERIALS INC·Filed 2005·Granted Mar 13, 2007·11 cites·20 claims
- 1489US11501993B2Semiconductor substrate supports with improved high temperature chuckingAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·2 cites·20 claims
- 1589US10074534B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2017·Granted Sep 11, 2018·5 cites·9 claims
- 1689US7867578B2Method for depositing an amorphous carbon film with improved density and step coverageAPPLIED MATERIALS INC·Filed 2006·Granted Jan 11, 2011·12 cites·14 claims
- 1788US10410872B2Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask applicationAPPLIED MATERIALS INC·Filed 2017·Granted Sep 10, 2019·5 cites·16 claims
- 1888US8227352B2Amorphous carbon deposition method for improved stack defectivityYU HANG·Filed 2011·Granted Jul 24, 2012·13 cites·20 claims
- 1988US7205228B2Selective metal encapsulation schemesAPPLIED MATERIALS INC·Filed 2004·Granted Apr 17, 2007·40 cites·33 claims
- 2087US10074559B1Selective poreseal deposition prevention and residue removal using SAMAPPLIED MATERIALS INC·Filed 2017·Granted Sep 11, 2018·5 cites·17 claims
- 2187US7259111B2Interface engineering to improve adhesion between low k stacksAPPLIED MATERIALS INC·Filed 2005·Granted Aug 21, 2007·14 cites·17 claims
- 2287US6824666B2Electroless deposition method over sub-micron aperturesAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·42 cites·102 claims
- 2386US6951599B2Electropolishing of metallic interconnectsAPPLIED MATERIALS INC·Filed 2002·Granted Oct 4, 2005·21 cites·19 claims
- 2484US8282734B2Methods to improve the in-film defectivity of PECVD amorphous carbon filmsPADHI DEENESH·Filed 2008·Granted Oct 9, 2012·6 cites·8 claims
- 2584US7166544B2Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursorsAPPLIED MATERIALS INC·Filed 2004·Granted Jan 23, 2007·20 cites·22 claims
- 2684US6905622B2Electroless deposition methodAPPLIED MATERIALS INC·Filed 2002·Granted Jun 14, 2005·32 cites·45 claims
- 2783US11784229B2Profile shaping for control gate recessesAPPLIED MATERIALS INC·Filed 2020·Granted Oct 10, 2023·1 cites·11 claims
- 2883US11646216B2Systems and methods of seasoning electrostatic chucks with dielectric seasoning filmsAPPLIED MATERIALS INC·Filed 2020·Granted May 9, 2023·1 cites·14 claims
- 2982US9502263B2UV assisted CVD AlN film for BEOL etch stop applicationAPPLIED MATERIALS INC·Filed 2015·Granted Nov 22, 2016·3 cites·17 claims
- 3081US8679987B2Deposition of an amorphous carbon layer with high film density and high etch selectivityREILLY PATRICK·Filed 2012·Granted Mar 25, 2014·7 cites·20 claims
- 3180US6899816B2Electroless deposition methodAPPLIED MATERIALS INC·Filed 2002·Granted May 31, 2005·24 cites·35 claims
- 3279US11594409B2Systems and methods for depositing low-k dielectric filmsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 28, 2023·1 cites·12 claims
- 3379US7514125B2Methods to improve the in-film defectivity of PECVD amorphous carbon filmsAPPLIED MATERIALS INC·Filed 2007·Granted Apr 7, 2009·2 cites·7 claims
- 3479US6878245B2Method and apparatus for reducing organic depletion during non-processing time periodsAPPLIED MATERIALS INC·Filed 2002·Granted Apr 12, 2005·12 cites·17 claims
- 3578US10109520B2Methods for depositing dielectric barrier layers and aluminum containing etch stop layersAPPLIED MATERIALS INC·Filed 2016·Granted Oct 23, 2018·2 cites·14 claims
- 3678US8097082B2Nonplanar faceplate for a plasma processing chamberZHOU JIANHUA·Filed 2008·Granted Jan 17, 2012·4 cites·16 claims
- 3777US12451345B2PECVD of SiBN thin films with low leakage currentAPPLIED MATERIALS INC·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 3877US11948846B2Analyzing in-plane distortionAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·20 claims
- 3977US10612135B2Method and system for high temperature cleanAPPLIED MATERIALS INC·Filed 2017·Granted Apr 7, 2020·2 cites·20 claims
- 4077US10515796B2Dry etch rate reduction of silicon nitride filmsAPPLIED MATERIALS INC·Filed 2018·Granted Dec 24, 2019·2 cites·20 claims
- 4177US2025346999A1Shaped showerhead for edge plasma modulationAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4276US11339475B2Film stack overlay improvementAPPLIED MATERIALS INC·Filed 2019·Granted May 24, 2022·2 cites·17 claims
- 4376US9984976B2Interconnect structures and methods of formationAPPLIED MATERIALS INC·Filed 2016·Granted May 29, 2018·2 cites·18 claims
- 4476US9580801B2Enhancing electrical property and UV compatibility of ultrathin blok barrier filmAPPLIED MATERIALS INC·Filed 2014·Granted Feb 28, 2017·3 cites·19 claims
- 4576US9337051B2Method for critical dimension reduction using conformal carbon filmsAPPLIED MATERIALS INC·Filed 2015·Granted May 10, 2016·2 cites·19 claims
- 4676US8778813B2Confined process volume PECVD chamberSANKARAKRISHNAN RAMPRAKASH·Filed 2011·Granted Jul 15, 2014·4 cites·17 claims
- 4776US8252699B2Composite removable hardmaskKONECNI ANTHONY·Filed 2010·Granted Aug 28, 2012·6 cites·19 claims
- 4876US2024243018A1Analyzing in-plane distortionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4975US12381106B2Systems and methods of seasoning electrostatic chucks with dielectric seasoning filmsAPPLIED MATERIALS INC·Filed 2023·Granted Aug 5, 2025·0 cites·19 claims
- 5075US12211908B2Profile shaping for control gate recessesAPPLIED MATERIALS INC·Filed 2023·Granted Jan 28, 2025·0 cites·8 claims
Showing the top 50 of 156 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →