Inventor · disambiguated record
Deqi Wang
Also filed as: WANG DEQI
19 granted patents·7 pending applications·369 citations·filing 2012–2024
95Inventor score
Files withLAM RES CORP11NOVELLUS SYSTEMS INC11WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD2GUAN YAN1WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD1
Top patents by PatentIndex Score
26 records- 0198US10916434B2Feature fill with multi-stage nucleation inhibitionLAM RES CORP·Filed 2020·Granted Feb 9, 2021·9 cites·19 claims
- 0298US10103058B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2017·Granted Oct 16, 2018·23 cites·13 claims
- 0398US9653353B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2013·Granted May 16, 2017·50 cites·16 claims
- 0498US9240347B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2014·Granted Jan 19, 2016·72 cites·20 claims
- 0597US11901227B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2021·Granted Feb 13, 2024·3 cites·18 claims
- 0697US10170320B2Feature fill with multi-stage nucleation inhibitionLAM RES CORP·Filed 2016·Granted Jan 1, 2019·20 cites·19 claims
- 0797US9997405B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2015·Granted Jun 12, 2018·22 cites·19 claims
- 0896US11075115B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2018·Granted Jul 27, 2021·11 cites·22 claims
- 0996US10580695B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2018·Granted Mar 3, 2020·13 cites·13 claims
- 1096US10580654B2Feature fill with multi-stage nucleation inhibitionLAM RES CORP·Filed 2018·Granted Mar 3, 2020·12 cites·14 claims
- 1196US10256142B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 9, 2019·25 cites·23 claims
- 1295US10211099B2Chamber conditioning for remote plasma processLAM RES CORP·Filed 2016·Granted Feb 19, 2019·24 cites·21 claims
- 1395US9034760B2Methods of forming tensile tungsten films and compressive tungsten filmsNOVELLUS SYSTEMS INC·Filed 2013·Granted May 19, 2015·25 cites·21 claims
- 1494US9589808B2Method for depositing extremely low resistivity tungstenLAM RES CORP·Filed 2013·Granted Mar 7, 2017·17 cites·14 claims
- 1592US8853080B2Method for depositing tungsten film with low roughness and low resistivityGUAN YAN·Filed 2012·Granted Oct 7, 2014·38 cites·19 claims
- 1690US11410883B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2019·Granted Aug 9, 2022·5 cites·19 claims
- 1774US2021327754A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2021·Application pending·0 cites
- 1866US2020185273A1Feature fill with nucleation inhibitionLAM RES CORP·Filed 2020·Application pending·0 cites
- 1964US12444651B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2022·Granted Oct 14, 2025·0 cites·7 claims
- 2064US2025149383A1Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2024·Application pending·0 cites
- 2158US11315983B2Display panel including multiple pixel units and display deviceWUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD·Filed 2019·Granted Apr 26, 2022·0 cites·8 claims
- 2255US11532685B2Doubled-side display device and manufacturing method thereofWUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD·Filed 2020·Granted Dec 20, 2022·0 cites·12 claims
- 2355US2016190008A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2015·Application pending·0 cites
- 2451US2024023420A1Display panel and manufacturing method thereofWUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD·Filed 2021·Application pending·0 cites
- 2551US2024278991A1In-line machine vision system for part tracking of substrate processing systemLAM RES CORP·Filed 2022·Application pending·0 cites
- 2647US2017133231A1Method for depositing extremely low resistivity tungstenLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →