Inventor · disambiguated record
Diederik Jan Maas
Also filed as: MAAS DIEDERIK JAN
10 granted patents·2 pending applications·47 citations·filing 2001–2022
85Inventor score
Top patents by PatentIndex Score
12 records- 0189US7518121B2Method for determining lens errors in a particle-optical deviceFEI CO·Filed 2006·Granted Apr 14, 2009·14 cites·21 claims
- 0281US8896809B2Lithographic apparatus and device manufacturing methodSTOELDRAIJER JUDOCUS MARIE DOMINICUS·Filed 2007·Granted Nov 25, 2014·9 cites·21 claims
- 0380US9567671B2Method and apparatus for depositing atomic layers on a substrateKNAAPEN RAYMOND JACOBUS WILHELMUS·Filed 2012·Granted Feb 14, 2017·5 cites·19 claims
- 0472US8624185B2Sample preparationMAAS DIEDERIK JAN·Filed 2011·Granted Jan 7, 2014·4 cites·20 claims
- 0570US6693278B2Particle-optical inspection device especially for semiconductor wafersFEI CO·Filed 2001·Granted Feb 17, 2004·15 cites·18 claims
- 0659US2024410827A1Metrology apparatus and metrology methods based on high harmonic generation from a diffractive structureASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0751US11977337B2Lithographic patterning methodTNO·Filed 2019·Granted May 7, 2024·0 cites·14 claims
- 0851US11549180B2Apparatus and method for atomic layer depositionMAAS DIEDERIK JAN·Filed 2009·Granted Jan 10, 2023·0 cites·20 claims
- 0948US8570489B2Lithographic projection apparatus and method of compensating perturbation factorsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2008·Granted Oct 29, 2013·0 cites·24 claims
- 1042US2014373868A1Surface cleaning device and a method of cleaning a surfaceTNO·Filed 2012·Application pending·0 cites
- 1140US12332574B2Lithographic patterning method and system thereforeTNO·Filed 2019·Granted Jun 17, 2025·0 cites·20 claims
- 1239US10014165B2Radiation sensor device for high energy photonsTNO·Filed 2015·Granted Jul 3, 2018·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →