Inventor · disambiguated record
Dirk Zeidler
Also filed as: ZEIDLER DIRK
46 granted patents·22 pending applications·553 citations·filing 1997–2025
98Inventor score
Files withCARL ZEISS MULTISEM GMBH48ZEISS CARL MICROSCOPY GMBH14ZEIDLER DIRK3APPLIED MATERIALS ISRAEL LTD1BOSCH GMBH ROBERT1
Top patents by PatentIndex Score
68 records- 0198US11239053B2Charged particle beam system and methodCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Feb 1, 2022·10 cites·27 claims
- 0298US10535494B2Particle beam system and method for the particle-optical examination of an objectZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Jan 14, 2020·39 cites·28 claims
- 0397US11158482B2Multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Oct 26, 2021·7 cites·22 claims
- 0497US10388487B2Method for operating a multi-beam particle microscopeZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Aug 20, 2019·34 cites·28 claims
- 0596US11562881B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Jan 24, 2023·3 cites·26 claims
- 0696US11164715B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Nov 2, 2021·4 cites·23 claims
- 0796US11049686B2Particle beam system and method for the particle-optical examination of an objectCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Jun 29, 2021·17 cites·23 claims
- 0896US10811215B2Charged particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Oct 20, 2020·35 cites·20 claims
- 0996US10741355B1Multi-beam charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2019·Granted Aug 11, 2020·44 cites·20 claims
- 1096US10600613B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Mar 24, 2020·33 cites·10 claims
- 1196US9263233B2Charged particle multi-beam inspection system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Feb 16, 2016·39 cites·5 claims
- 1295US11087955B2System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combinationCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·8 cites·28 claims
- 1395US10163603B2Particle beam system and method for the particle-optical examination of an objectZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 25, 2018·12 cites·22 claims
- 1495US9653254B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted May 16, 2017·33 cites·22 claims
- 1594US11735393B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Aug 22, 2023·5 cites·24 claims
- 1694US10896800B2Charged particle beam system and methodCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Jan 19, 2021·44 cites·20 claims
- 1794US9991089B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Jun 5, 2018·34 cites·24 claims
- 1894US9349571B2Particle optical systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted May 24, 2016·33 cites·18 claims
- 1994US8598525B2Particle beam systemZEIDLER DIRK·Filed 2011·Granted Dec 3, 2013·29 cites·21 claims
- 2093US9552957B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jan 24, 2017·10 cites·23 claims
- 2191US12094683B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2023·Granted Sep 17, 2024·1 cites·20 claims
- 2291US11069508B2Method of imaging a 3D sample with a multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Jul 20, 2021·4 cites·23 claims
- 2391US9336982B2Method of detecting electrons, an electron-detector and an inspection systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted May 10, 2016·39 cites·24 claims
- 2489US11657999B2Particle beam system and method for the particle-optical examination of an objectCARL ZEISS MULTISEM GMBH·Filed 2021·Granted May 23, 2023·1 cites·20 claims
- 2589US9799485B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Oct 24, 2017·8 cites·10 claims
- 2689US2025379030A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 2786US9384938B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEIDLER DIRK·Filed 2011·Granted Jul 5, 2016·9 cites·18 claims
- 2885US10147582B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 4, 2018·3 cites·20 claims
- 2984US12488958B2Method for operating a multi-beam particle beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2024·Granted Dec 2, 2025·0 cites·20 claims
- 3082US11562880B2Particle beam system for adjusting the current of individual particle beamsCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Jan 24, 2023·1 cites·24 claims
- 3181US2025210302A1Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-beam microscope for voltage contrast imaging and semiconductor structures for voltage contrast imaging with a corpuscular multi-beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 3280US8759760B2Inspection systemZEIDLER DIRK·Filed 2011·Granted Jun 24, 2014·5 cites·28 claims
- 3380US2025232951A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3476US12494343B2Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distanceCARL ZEISS MULTISEM GMBH·Filed 2023·Granted Dec 9, 2025·0 cites·21 claims
- 3575US12300462B2System comprising a multi-beam particle microscope and method for operating the sameCARL ZEISS MULTISEM GMBH·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 3673US12119204B2Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beamsCARL ZEISS MULTISEM GMBH·Filed 2022·Granted Oct 15, 2024·0 cites·21 claims
- 3772US2025349497A1Method for designing a multi-beam particle beam system having monolithic path trajectory correction plates, computer program product and multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 3871US12293896B2Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted May 6, 2025·0 cites·33 claims
- 3971US2025349500A1Multi-beam charged particle microscope design with a detection unit for fast compensation of charging effectsCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4071US2022254600A1Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-beam microscope for voltage contrast imaging and semiconductor structures for voltage contrast imaging with a corpuscular multi-beam microscopeCARL ZEISS MULTISEM GMBH·Filed 2022·Application pending·0 cites
- 4170US2025343021A1Fast closed-loop control of multi-beam charged particle systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4268US11521827B2Method of imaging a 2D sample with a multi-beam particle microscopeCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Dec 6, 2022·0 cites·15 claims
- 4368US2025372343A1Multi-beam charged particle microscope design with adaptive detection systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4468US2025299905A1Multi-beam charged particle microscope design with detection system for fast charge compensationCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 4567US2023043036A1High throughput multi-beam charged particle inspection system with dynamic controlCARL ZEISS MULTISEM GMBH·Filed 2022·Application pending·0 cites
- 4666US11087948B2Multi-beam charged particle systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
- 4766US2025132124A1Multi-beam charged particle microscope design with mirror for field curvature correctionCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 4865US11935721B2System comprising a multi-beam particle microscope and method for operating the sameCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 19, 2024·0 cites·21 claims
- 4965US2025343025A1Multi-beam particle microscope with improved multi-beam generator for field curvature correction and multi-beam generatorCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 5061US2024234080A9Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2023·Application pending·0 cites
Showing the top 50 of 68 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Dirk Zeidler files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →