Inventor · disambiguated record
Durgalakshmi Singhal
Also filed as: SINGHAL DURGALAKSHMI · SINGHAL DURGALAKSHMI A
1 granted patent·2 pending applications·7 citations·filing 2013–2023
29Inventor score
Top patents by PatentIndex Score
3 records- 0178US9070750B2Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environmentNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 30, 2015·7 cites·20 claims
- 0259US2025068065A1Enhanced euv underlayer effect with diffusion barrier layerLAM RES CORP·Filed 2023·Application pending·0 cites
- 0356US2025328081A1Underlayer with bonded dopants for photolithographyLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →