Inventor · disambiguated record
Eric J. Bergman
Also filed as: BERGMAN ERIC · BERGMAN ERIC J · BERGMAN ERIC JEFFERY
85 granted patents·31 pending applications·2,601 citations·filing 1990–2024
99Inventor score
Files withSEMITOOL INC59APPLIED MATERIALS INC30FRESENIUS MEDICAL CARE HOLDINGS INC13BERGMAN ERIC J8LEONHARD JERRY DUSTIN1
Top patents by PatentIndex Score
116 records- 0196US6286231B1Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2000·Granted Sep 11, 2001·178 cites·56 claims
- 0296US6273108B1Apparatus and method for processing the surface of a workpiece with ozoneSEMITOOL INC·Filed 2000·Granted Aug 14, 2001·93 cites·21 claims
- 0396US6267125B1Apparatus and method for processing the surface of a workpiece with ozoneSEMITOOL INC·Filed 2000·Granted Jul 31, 2001·104 cites·25 claims
- 0496US5377708AMulti-station semiconductor processor with volatilizationSEMITOOL INC·Filed 1993·Granted Jan 3, 1995·247 cites·83 claims
- 0595US6497768B2Process for treating a workpiece with hydrofluoric acid and ozoneSEMITOOL INC·Filed 2001·Granted Dec 24, 2002·53 cites·28 claims
- 0695US5500081ADynamic semiconductor wafer processing using homogeneous chemical vaporsFiled 1994·Granted Mar 19, 1996·212 cites·27 claims
- 0794US6240933B1Methods for cleaning semiconductor surfacesSEMITOOL INC·Filed 1997·Granted Jun 5, 2001·118 cites·85 claims
- 0894US5235995ASemiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilizationSEMITOOL INC·Filed 1991·Granted Aug 17, 1993·168 cites·30 claims
- 0993US12116686B2Parameter adjustment model for semiconductor processing chambersAPPLIED MATERIALS INC·Filed 2022·Granted Oct 15, 2024·2 cites·17 claims
- 1093US11634830B2Electrochemical depositions of nanotwin copper materialsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 25, 2023·2 cites·17 claims
- 1193US6582525B2Methods for processing a workpiece using steam and ozoneFiled 2001·Granted Jun 24, 2003·44 cites·41 claims
- 1292US6869487B1Process and apparatus for treating a workpiece such as a semiconductor waferSEMITOOL INC·Filed 2000·Granted Mar 22, 2005·53 cites·25 claims
- 1392US5762751ASemiconductor processor with wafer face protectionSEMITOOL INC·Filed 1995·Granted Jun 9, 1998·120 cites·41 claims
- 1490US10546762B2Drying high aspect ratio featuresAPPLIED MATERIALS INC·Filed 2017·Granted Jan 28, 2020·6 cites·20 claims
- 1590US6817370B2Method for processing the surface of a workpieceSEMITOOL INC·Filed 2003·Granted Nov 16, 2004·29 cites·26 claims
- 1690US6591845B1Apparatus and method for processing the surface of a workpiece with ozoneSEMITOOL INC·Filed 2000·Granted Jul 15, 2003·33 cites·7 claims
- 1790US6357142B1Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2001·Granted Mar 19, 2002·43 cites·53 claims
- 1890US5489341ASemiconductor processing with non-jetting fluid stream discharge arraySEMITOOL INC·Filed 1993·Granted Feb 6, 1996·116 cites·26 claims
- 1989US5232511ADynamic semiconductor wafer processing using homogeneous mixed acid vaporsSEMITOOL INC·Filed 1991·Granted Aug 3, 1993·123 cites·119 claims
- 2088US6843857B2Methods for cleaning semiconductor surfacesSEMITOOL INC·Filed 2003·Granted Jan 18, 2005·27 cites·18 claims
- 2186US6830628B2Methods for cleaning semiconductor surfacesSEMITOOL INC·Filed 2001·Granted Dec 14, 2004·23 cites·11 claims
- 2285US6601594B2Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpieceSEMITOOL INC·Filed 2001·Granted Aug 5, 2003·20 cites·34 claims
- 2385US5954911ASemiconductor processing using vapor mixturesSEMITOOL INC·Filed 1996·Granted Sep 21, 1999·57 cites·71 claims
- 2485US5370741ADynamic semiconductor wafer processing using homogeneous chemical vaporsSEMITOOL INC·Filed 1992·Granted Dec 6, 1994·81 cites·69 claims
- 2584US11982008B2Electroplating systemAPPLIED MATERIALS INC·Filed 2023·Granted May 14, 2024·0 cites·5 claims
- 2684US5238500AAqueous hydrofluoric and hydrochloric acid vapor processing of semiconductor wafersSEMITOOL INC·Filed 1990·Granted Aug 24, 1993·90 cites·40 claims
- 2783US6745494B2Method and apparatus for processing wafers under pressureSEMITOOL INC·Filed 2002·Granted Jun 8, 2004·21 cites·21 claims
- 2883US6701941B1Method for treating the surface of a workpieceSEMITOOL INC·Filed 2000·Granted Mar 9, 2004·18 cites·17 claims
- 2983US6401732B2Thermocapillary dryerSEMITOOL INC·Filed 2000·Granted Jun 11, 2002·24 cites·22 claims
- 3083US5584310ASemiconductor processing with non-jetting fluid stream discharge arraySEMITOOL INC·Filed 1995·Granted Dec 17, 1996·62 cites·45 claims
- 3182US6488038B1Method for cleaning semiconductor substratesSEMITOOL INC·Filed 2000·Granted Dec 3, 2002·27 cites·12 claims
- 3281US10240248B2Adaptive electric field shielding in an electroplating processor using agitator geometry and motion controlAPPLIED MATERIALS INC·Filed 2016·Granted Mar 26, 2019·1 cites·9 claims
- 3381US7378355B2System and methods for polishing a waferSEMITOOL INC·Filed 2005·Granted May 27, 2008·10 cites·16 claims
- 3481US6837252B2Apparatus for treating a workpiece with steam and ozoneSEMITOOL INC·Filed 2003·Granted Jan 4, 2005·21 cites·22 claims
- 3580US11578422B2Electroplating systemAPPLIED MATERIALS INC·Filed 2022·Granted Feb 14, 2023·0 cites·17 claims
- 3680US7264680B2Process and apparatus for treating a workpiece using ozoneSEMITOOL INC·Filed 2004·Granted Sep 4, 2007·29 cites·13 claims
- 3779US6192600B1Thermocapillary dryerSEMITOOL INC·Filed 1999·Granted Feb 27, 2001·45 cites·15 claims
- 3878US10002771B1Methods for chemical mechanical polishing (CMP) processing with ozoneAPPLIED MATERIALS INC·Filed 2017·Granted Jun 19, 2018·3 cites·20 claims
- 3977US11350887B2Systems and methods for detection of potential health issuesFRESENIUS MEDICAL CARE HOLDINGS INC·Filed 2019·Granted Jun 7, 2022·2 cites·20 claims
- 4077US6543156B2Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2002·Granted Apr 8, 2003·14 cites·49 claims
- 4177US5332445AAqueous hydrofluoric acid vapor processing of semiconductor wafersSEMITOOL INC·Filed 1992·Granted Jul 26, 1994·62 cites·72 claims
- 4276US12404597B2Electrochemical depositions of nanotwin copper materialsAPPLIED MATERIALS INC·Filed 2023·Granted Sep 2, 2025·0 cites·18 claims
- 4376US6746565B1Semiconductor processor with wafer face protectionSEMITOOL INC·Filed 2000·Granted Jun 8, 2004·19 cites·7 claims
- 4476US2025025613A1Thermal protection system for a dialysate containerFRESENIUS MEDICAL CARE HOLDINGS INC·Filed 2024·Application pending·0 cites
- 4575US7416611B2Process and apparatus for treating a workpiece with gasesSEMITOOL INC·Filed 2004·Granted Aug 26, 2008·17 cites·24 claims
- 4674US6162734ASemiconductor processing using vapor mixturesSEMITOOL INC·Filed 1999·Granted Dec 19, 2000·32 cites·23 claims
- 4773US11697888B2Methods of reducing or eliminating deposits after electrochemical plating in an electroplating processorAPPLIED MATERIALS INC·Filed 2022·Granted Jul 11, 2023·0 cites·18 claims
- 4873US11371159B2Methods of reducing or eliminating deposits after electrochemical plating in an electroplating processorAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·0 cites·16 claims
- 4973US11268208B2Electroplating systemAPPLIED MATERIALS INC·Filed 2020·Granted Mar 8, 2022·0 cites·15 claims
- 5071US6199298B1Vapor assisted rotary drying method and apparatusSEMITOOL INC·Filed 1999·Granted Mar 13, 2001·37 cites·27 claims
Showing the top 50 of 116 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →