Inventor · disambiguated record
Erica Chen
Also filed as: CHEN ERICA · CHEN ERICA MAXINE
22 granted patents·6 pending applications·45 citations·filing 2014–2024
91Inventor score
Top patents by PatentIndex Score
28 records- 0197US9777378B2Advanced process flow for high quality FCVD filmsAPPLIED MATERIALS INC·Filed 2015·Granted Oct 3, 2017·18 cites·19 claims
- 0296US11101174B2Gap fill deposition processAPPLIED MATERIALS INC·Filed 2019·Granted Aug 24, 2021·16 cites·19 claims
- 0393US10192775B2Methods for gapfill in high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2017·Granted Jan 29, 2019·7 cites·13 claims
- 0480US9620407B23D material modification for advanced processingAPPLIED MATERIALS INC·Filed 2015·Granted Apr 11, 2017·3 cites·16 claims
- 0577US12111572B2Methods of greytone imprint lithography to fabricate optical devicesAPPLIED MATERIALS INC·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 0677US11709423B2Methods of greytone imprint lithography to fabricate optical devicesAPPLIED MATERIALS INC·Filed 2022·Granted Jul 25, 2023·0 cites·20 claims
- 0773US12384185B2Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (SAM) structures on substratesAPPLIED MATERIALS INC·Filed 2023·Granted Aug 12, 2025·0 cites·21 claims
- 0872US11682556B2Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materialsAPPLIED MATERIALS INC·Filed 2022·Granted Jun 20, 2023·0 cites·10 claims
- 0972US11488856B2Methods for gapfill in high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2020·Granted Nov 1, 2022·0 cites·15 claims
- 1072US10770292B2Wafer treatment for achieving defect-free self-assembled monolayersAPPLIED MATERIALS INC·Filed 2018·Granted Sep 8, 2020·1 cites·27 claims
- 1170US12493138B2Airgap structures for improved eyepiece efficiencyAPPLIED MATERIALS INC·Filed 2022·Granted Dec 9, 2025·0 cites·20 claims
- 1265US11735420B2Wafer treatment for achieving defect-free self-assembled monolayersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·0 cites·20 claims
- 1365US2024329322A1Low refractive index materials on the gratings to improve the waveguide efficiencyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1463US11289331B2Methods for graphene formation using microwave surface-wave plasma on dielectric materialsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·0 cites·20 claims
- 1563US10811303B2Methods for gapfill in high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2019·Granted Oct 20, 2020·0 cites·9 claims
- 1656US2023273355A1Inkjet inks for deposition and removal in a laser dicing processAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1753US10964527B2Residual removalAPPLIED MATERIALS INC·Filed 2019·Granted Mar 30, 2021·0 cites·19 claims
- 1853US10892161B2Enhanced selective deposition processAPPLIED MATERIALS INC·Filed 2018·Granted Jan 12, 2021·0 cites·20 claims
- 1953US9773675B23D material modification for advanced processingAPPLIED MATERIALS INC·Filed 2017·Granted Sep 26, 2017·0 cites·20 claims
- 2052US12288672B2Methods and apparatus for carbon compound film depositionAPPLIED MATERIALS INC·Filed 2020·Granted Apr 29, 2025·0 cites·20 claims
- 2151US11955333B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted Apr 9, 2024·0 cites·18 claims
- 2249US11049731B2Methods for film modificationAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·0 cites·20 claims
- 2347US10096512B2Gapfill film modification for advanced CMP and recess flowAPPLIED MATERIALS INC·Filed 2016·Granted Oct 9, 2018·0 cites·6 claims
- 2447US2024249949A1Tungsten wordline fill in high aspect ratio 3d nand architectureLAM RES CORP·Filed 2022·Application pending·0 cites
- 2546US2022298636A1Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2645US2016079034A1Flowable film properties tuning using implantationAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2743US9595467B2Air gap formation in interconnection structure by implantation processAPPLIED MATERIALS INC·Filed 2015·Granted Mar 14, 2017·0 cites·19 claims
- 2841US2023260814A1Exclusion ring for substrate processingLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →