Inventor · disambiguated record
Erik Ham
Also filed as: HAM ERIK L · HAM ERIK LEONARDUS
8 granted patents·3 pending applications·126 citations·filing 2001–2011
87Inventor score
Top patents by PatentIndex Score
11 records- 0191US6781673B2Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Aug 24, 2004·56 cites·30 claims
- 0287US8476167B2Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusVAN MIERLO HUBERT ADRIAAN·Filed 2011·Granted Jul 2, 2013·14 cites·13 claims
- 0379US6753945B2Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer methodASML NETHERLANDS BV·Filed 2003·Granted Jun 22, 2004·25 cites·15 claims
- 0470US7153612B2Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Dec 26, 2006·15 cites·24 claims
- 0567US7123344B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 17, 2006·9 cites·23 claims
- 0656US7202934B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·4 cites·12 claims
- 0751US7151589B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·3 cites·32 claims
- 0849US2007117028A1Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 0944US2007139855A1Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 1038US7248340B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·0 cites·11 claims
- 1138US2002096647A1Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Erik Ham files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →