Inventor · disambiguated record
Eric Munro
Also filed as: MUNRO ERIC
9 granted patents·937 citations·filing 1994–2005
90Inventor score
Top patents by PatentIndex Score
9 records- 0195US5578821AElectron beam inspection system and methodKLA INSTR CORP·Filed 1995·Granted Nov 26, 1996·421 cites·51 claims
- 0295US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0393US7164139B1Wien filter with reduced chromatic aberrationKLA TENCOR TECH CORP·Filed 2005·Granted Jan 16, 2007·26 cites·12 claims
- 0492US7141791B2Apparatus and method for E-beam dark field imagingKLA TENCOR TECH CORP·Filed 2004·Granted Nov 28, 2006·53 cites·25 claims
- 0590US7217924B1Holey mirror arrangement for dual-energy e-beam inspectorKLA TENCOR TECH CORP·Filed 2005·Granted May 15, 2007·15 cites·16 claims
- 0667US6440620B1Electron beam lithography focusing through spherical aberration introductionAGERE SYSTEMS INC·Filed 2000·Granted Aug 27, 2002·11 cites·6 claims
- 0764US6441378B1Magnetic energy filterJEOL LTD·Filed 2000·Granted Aug 27, 2002·6 cites·7 claims
- 0854US6420714B1Electron beam imaging apparatusAGERE SYST GUARDIAN CORP·Filed 2000·Granted Jul 16, 2002·5 cites·6 claims
- 0939US6620565B2Electron beam lithography apparatus focused through spherical aberration introductionAGERE SYSTEMS INC·Filed 2002·Granted Sep 16, 2003·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →