Inventor · disambiguated record
Erich Schubert
Also filed as: SCHUBERT ERICH
8 granted patents·3 pending applications·65 citations·filing 2004–2018
86Inventor score
Top patents by PatentIndex Score
11 records- 0198US9599904B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Mar 21, 2017·15 cites·20 claims
- 0292US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0388US8467031B2Illumination system for illuminating a mask in a microlithographic exposure apparatusSCHUBERT ERICH·Filed 2010·Granted Jun 18, 2013·6 cites·28 claims
- 0487US9310694B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Apr 12, 2016·3 cites·27 claims
- 0582US10191382B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Jan 29, 2019·1 cites·18 claims
- 0669US7405809B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2006·Granted Jul 29, 2008·6 cites·23 claims
- 0767US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 0862US9977333B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2017·Granted May 22, 2018·0 cites·12 claims
- 0945US2008042079A1Collector with fastening devices for fastening mirror shellsCARL ZEISS SMT·Filed 2007·Application pending·0 cites
- 1044US2008165925A1Double-facetted illumination system with attenuator elements on the pupil facet mirrorZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1137US2011019171A1Optical unit having adjustable force action on an optical moduleZEISS CARL SMT AG·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →