Collector with fastening devices for fastening mirror shells

Abstract

There is provided a system that includes a first optical sub-system contained in a first space, and a second optical sub-system contained in a second space. The first and said second spaces are separated by a structure selected from the group consisting of a diaphragm and a valve.

1 . A system comprising: 
 a first optical sub-system contained in a first space; and    a second optical sub-system contained in a second space,    wherein said first and said second spaces are separated by a structure selected from the group consisting of a diaphragm and a valve.    
     
     
         2 . The system of  claim 1 , wherein said first optical sub-system comprises a light source.  
     
     
         3 . The system of  claim 2 , wherein said light source emits light having a wavelength of less than or equal to 126 nm.  
     
     
         4 . The system of  claim 3 , wherein said first optical sub-system comprises a collector.  
     
     
         5 . The system of  claim 3 , wherein said first optical sub-system comprises a plane mirror.  
     
     
         6 . The system of  claim 3 , wherein said first optical sub-system comprises a grating element.  
     
     
         7 . The system of  claim 3 , further comprising: 
 a path for said light, between said first optical sub-system and said second optical sub-system,    wherein said system forms an intermediate image of said light source in said path.    
     
     
         8 . The system of  claim 7 , wherein said structure is situated close to said intermediate image.  
     
     
         9 . The system of  claim 3 , wherein said system is employed as an illumination system of a microlithography exposure apparatus.  
     
     
         10 . A collector comprising: 
 a mirror fastened to a spoke,    wherein said spoke has a tapered configuration.    
     
     
         11 . The collector of  claim 10 , wherein said mirror is a mirror shell having a object side aperture and an image side aperture.  
     
     
         12 . The collector of  claim 11 , wherein said spoke tapers from said object side aperture to said image side aperture.  
     
     
         13 . The collector of  claim 11 , further comprising: 
 an exit side,    wherein said spoke has a thickness d 1  in a region of said object side aperture, and a substantially lower thickness d 2  on said exit side.    
     
     
         14 . The collector of  claim 10 , wherein said mirror has a groove to which said mirror is fastened.  
     
     
         15 . The collector of  claim 10 , 
 wherein said mirror is a first mirror shell, and    wherein said collector further comprises a second mirror shell situated within said first mirror shell.    
     
     
         16 . The collector of  claim 15 , wherein said spoke is of a material having a thermal expansion coefficient that provides for a substantially equal deformation in shape of said first and said second mirror shells.  
     
     
         17 . The collector of  claim 15 , 
 wherein said collector provides for transmission of light having a wavelength of less than or equal to 193 nm, and    wherein said transmission of light is different for said first mirror shell and said second mirror shell.    
     
     
         18 . An illumination system comprising: 
 a light source that emits light for illuminating an area in a plane; and    a collector in a path of said light from said light source to said plane,    wherein said collector includes a mirror fastened to a spoke having a tapered configuration.    
     
     
         19 . An illumination system comprising: 
 a light source that emits light for illuminating an area in a plane;    a light path for said light, from said light source to said plane;    an optical component;    a collector that collects said light from said light source and directs said light, via said light path, to said optical component; and    an intensity adjustment device situated in said light path, before said optical component.    
     
     
         20 . The illumination system of  claim 19 , wherein said intensity adjustment device is situated in said light path, downstream of said light source and before said collector.  
     
     
         21 . The illumination system of  claim 19 , wherein said intensity adjustment device is situated in said light path, downstream of said collector and before said optical component.  
     
     
         22 . The illumination system of  claim 19 , wherein said intensity adjustment device is a filter element having a plurality of wires with a resultant density of wires.  
     
     
         23 . The illumination system of  claim 22 , wherein said density is changeable to adjust a transmission of said light.  
     
     
         24 . The illumination system of  claim 23 , wherein said transmission of said filter element is adjusted to adjust a uniformity in said plane.  
     
     
         25 . The illumination system of  claim 19 , 
 wherein said collector has a first mirror shell and a second mirror shell,    wherein said intensity adjustment device provides a first transmission for said first mirror shell and a second transmission for said second mirror shell, and    wherein said first transmission is different from said second transmission.