Inventor · disambiguated record
Wilhelm Egle
Also filed as: EGLE WILHELM
12 granted patents·3 pending applications·180 citations·filing 1978–2011
92Inventor score
Top patents by PatentIndex Score
15 records- 0192US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0292US7244954B2Collector having unused region for illumination systems using a wavelength ≦193 nmZEISS CARL SMT AG·Filed 2005·Granted Jul 17, 2007·14 cites·27 claims
- 0391US7015489B2Collector having unused region for illumination systems using a wavelength less than or equal to 193 nmZEISS CARL SMT AG·Filed 2003·Granted Mar 21, 2006·36 cites·21 claims
- 0489US7483223B2Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT AG·Filed 2005·Granted Jan 27, 2009·14 cites·20 claims
- 0586US7460212B2Collector configured of mirror shellsZEISS CARL SMT AG·Filed 2007·Granted Dec 2, 2008·11 cites·14 claims
- 0679US4812652AImaging method and apparatus for electron microscopesZEISS STIFTUNG·Filed 1987·Granted Mar 14, 1989·38 cites·30 claims
- 0777US7965456B2Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT GMBH·Filed 2008·Granted Jun 21, 2011·4 cites·30 claims
- 0868US6927403B2Illumination system that suppresses debris from a light sourceASML LITHOGRAPHY B V·Filed 2002·Granted Aug 9, 2005·10 cites·29 claims
- 0967US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 1064US7410265B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2003·Granted Aug 12, 2008·7 cites·50 claims
- 1149US4396861AHigh voltage lead-throughZEISS STIFTUNG·Filed 1980·Granted Aug 2, 1983·7 cites·12 claims
- 1249US2011211180A1Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT GMBH·Filed 2011·Application pending·0 cites
- 1345US4194116AElectron microscope or the like and method of useZEISS STIFTUNG·Filed 1978·Granted Mar 18, 1980·5 cites·12 claims
- 1445US2008042079A1Collector with fastening devices for fastening mirror shellsCARL ZEISS SMT·Filed 2007·Application pending·0 cites
- 1536US2008099935A1High-Precision Optical Surface Prepared by Sagging from a MasterpieceEGLE WILHELM·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →