Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

Abstract

An optical component includes an optical element, a mount for the optical element, and a temperature control device configured to control a temperature of a part of the mount based on at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount.

1 . An optical component, comprising:
 an optical element;   a mount for the optical element; and   a temperature control device configured to control a temperature of a part of the mount based on at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount.   
     
     
         2 . The optical component of  claim 1 , wherein the temperature is a temperature at which heating induced expansion of the optical element during operation of the optical component results in the least deformation of the optical element. 
     
     
         3 . The optical component of  claim 2 , wherein the temperature control device is configured to control the temperature of the part of the mount based on the coefficient of expansion of the substrate of the optical element. 
     
     
         4 . The optical component of  claim 2 , wherein the temperature control device is configured to control the temperature of the part of the mount depending on the coefficient of expansion of the material of the mount. 
     
     
         5 . The optical component of  claim 1 , wherein the temperature control device is configured to control the temperature of the part of the mount based on the coefficient of expansion of the substrate of the optical element. 
     
     
         6 . The optical component of  claim 5 , wherein the temperature control device is configured to control the temperature of the part of the mount based on the coefficient of expansion of the material of the mount. 
     
     
         7 . The optical component of  claim 1 , wherein the temperature control device is configured to control the temperature of the part of the mount based on the coefficient of expansion of the material of the mount. 
     
     
         8 . The optical component of  claim 1 , wherein the temperature control device is configured to control the temperature of the part of the mount to within a temperature interval. 
     
     
         9 . The optical component of  claim 1 , wherein the temperature of the part of the mount changes during operation of the optical component. 
     
     
         10 . The optical component of  claim 1 , wherein the temperature control device comprises a heating system. 
     
     
         11 . The optical component of  claim 10 , wherein the temperature control device comprises a cooling system. 
     
     
         12 . The optical component of  claim 1 , wherein the temperature control device comprises a cooling system. 
     
     
         13 . The optical component of  claim 1 , wherein the optical element comprises:
 collector shells nested in each other; and   holding elements comprising a plurality of radially directed spokes connected to at least some of the shells.   
     
     
         14 . The optical component of  claim 13 , wherein the spokes are connected to at least one ring selected from the group consisting of a common outer ring and a common inner ring. 
     
     
         15 . The optical component of  claim 1 , wherein the optical component is configured to be used in EUV lithography. 
     
     
         16 . A method, comprising:
 providing an optical component comprising an optical element and a mount for the optical element;   determining at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount; and   controlling a temperature of a part of the mount based on the at least one parameter.   
     
     
         17 . The method of  claim 16 , wherein the at least one parameter comprises the at least one parameter comprises the coefficient of expansion of the material of the mount. 
     
     
         18 . The method of  claim 17 , wherein the at least one parameter comprises the coefficient of expansion of the material of the mount. 
     
     
         19 . The method of  claim 16 , wherein the at least one parameter comprises the coefficient of expansion of the material of the mount. 
     
     
         20 . The method of  claim 16 , wherein the optical component is configured to be used in EUV lithography.