Inventor · disambiguated record
Willi Anderl
Also filed as: ANDERL WILLI
11 granted patents·3 pending applications·37 citations·filing 2005–2023
86Inventor score
Top patents by PatentIndex Score
14 records- 0189US7483223B2Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT AG·Filed 2005·Granted Jan 27, 2009·14 cites·20 claims
- 0286US8342701B2Reflective optical element for use in an EUV systemZEISS CARL LASER OPTICS GMBH·Filed 2010·Granted Jan 1, 2013·14 cites·25 claims
- 0383US11372334B2Method for producing a reflective optical element, reflective optical element, and use of a reflective optical elementZEISS CARL SMT GMBH·Filed 2019·Granted Jun 28, 2022·1 cites·20 claims
- 0477US10534269B2Method for producing a reflective optical element, reflective optical element, and use of a reflective optical elementZEISS CARL SMT GMBH·Filed 2017·Granted Jan 14, 2020·2 cites·25 claims
- 0577US7965456B2Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT GMBH·Filed 2008·Granted Jun 21, 2011·4 cites·30 claims
- 0673US9843153B2Beam reverser module and optical power amplifier having such a beam reverser moduleZEISS CARL SMT GMBH·Filed 2015·Granted Dec 12, 2017·2 cites·26 claims
- 0762US12353137B2Field facet system and lithography apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 0859US11789367B2Facet mirror for an illumination optical unit of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Oct 17, 2023·0 cites·21 claims
- 0954US10777958B2Beam reverser module and optical power amplifier having such a beam reverser moduleZEISS CARL SMT GMBH·Filed 2017·Granted Sep 15, 2020·0 cites·18 claims
- 1050US10969699B2Projection lighting system for semiconductor lithography with an improved heat transferZEISS CARL SMT GMBH·Filed 2019·Granted Apr 6, 2021·0 cites·20 claims
- 1149US2011211180A1Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical componentZEISS CARL SMT GMBH·Filed 2011·Application pending·0 cites
- 1245US10303067B2Cooler for use in a device in a vacuumZEISS CARL SMT GMBH·Filed 2016·Granted May 28, 2019·0 cites·22 claims
- 1342US2013176614A1Euv collector mirror shell of an euv collector for euv lithographyZEISS CARL LASER OPTICS GMBH·Filed 2013·Application pending·0 cites
- 1434US2015083938A1Cooler for plasma generation chamber of euv radiation sourceZEISS CARL LASER OPTICS GMBH·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →