Inventor · disambiguated record
Bernhard Gellrich
Also filed as: GELLRICH BERNHARD · GELLRICH BERNHARD DIPL-ING
54 granted patents·14 pending applications·474 citations·filing 2000–2023
98Inventor score
Files withZEISS CARL SMT GMBH23ZEISS CARL SMT AG22ZEISS STIFTUNG5HOOGENDAM CHRISTIAAN ALEXANDER3ASML NETHERLANDS BV2
Top patents by PatentIndex Score
68 records- 0193US7570343B2Microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Aug 4, 2009·14 cites·8 claims
- 0293US6392825B1Assembly comprising an optical element and a mountZEISS STIFTUNG·Filed 2000·Granted May 21, 2002·88 cites·36 claims
- 0392US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0491US6580570B2Mounting apparatus for an optical elementZEISS STIFTUNG·Filed 2001·Granted Jun 17, 2003·60 cites·42 claims
- 0588US7193794B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2004·Granted Mar 20, 2007·29 cites·110 claims
- 0687US8810771B2Lithographic apparatus and device manufacturing methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2011·Granted Aug 19, 2014·3 cites·20 claims
- 0786US6844994B2Optical element deformation systemZEISS CARL SMT AG·Filed 2001·Granted Jan 18, 2005·34 cites·45 claims
- 0884US7760327B2Reflecting optical element with eccentric optical passagewayZEISS CARL SMT AG·Filed 2006·Granted Jul 20, 2010·8 cites·55 claims
- 0982US9104016B2Optical projection systemZEISS CARL SMT GMBH·Filed 2012·Granted Aug 11, 2015·2 cites·24 claims
- 1082US8279402B2Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the sameSIX STEPHAN·Filed 2009·Granted Oct 2, 2012·11 cites·27 claims
- 1182US6816325B1Mounting apparatus for an optical elementZEISS CARL SMT AG·Filed 2003·Granted Nov 9, 2004·26 cites·45 claims
- 1281US6445510B1Optical imaging device, in particular lens system, with at least one system diaphragmZEISS STIFTUNG·Filed 2000·Granted Sep 3, 2002·29 cites·12 claims
- 1379US6897599B2System for damping oscillationsZEISS CARL SMT AG·Filed 2002·Granted May 24, 2005·20 cites·31 claims
- 1476US8300210B2Optical projection systemRAU JOHANNES·Filed 2005·Granted Oct 30, 2012·3 cites·33 claims
- 1576US6369959B1Assembly comprising an optical element and a mountZEISS STIFTUNG·Filed 2000·Granted Apr 9, 2002·21 cites·18 claims
- 1675US6700715B2Oscillation damping systemZEISS CARL SMT AG·Filed 2001·Granted Mar 2, 2004·16 cites·23 claims
- 1775US6594093B2Adjusting apparatus for an optical element in a lens systemZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Jul 15, 2003·23 cites·24 claims
- 1873US8902401B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2012·Granted Dec 2, 2014·1 cites·22 claims
- 1973US8027024B2Replacement device for an optical elementZEISS CARL SMT GMBH·Filed 2008·Granted Sep 27, 2011·3 cites·24 claims
- 2071US8363206B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2008·Granted Jan 29, 2013·2 cites·48 claims
- 2170US9557653B2Optical projection systemZEISS CARL SMT GMBH·Filed 2015·Granted Jan 31, 2017·1 cites·30 claims
- 2270US8027023B2Optical imaging device and method for reducing dynamic fluctuations in pressure differenceZEISS CARL SMT GMBH·Filed 2007·Granted Sep 27, 2011·2 cites·22 claims
- 2367US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 2466US10809636B2Optical arrangement, in particular lithography systemZEISS CARL SMT GMBH·Filed 2019·Granted Oct 20, 2020·2 cites·20 claims
- 2565US9182679B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 10, 2015·0 cites·20 claims
- 2665US8659745B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsZEISS CARL SMT GMBH·Filed 2013·Granted Feb 25, 2014·1 cites·32 claims
- 2764US7656595B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2008·Granted Feb 2, 2010·1 cites·27 claims
- 2864US7410265B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2003·Granted Aug 12, 2008·7 cites·50 claims
- 2963US7295331B2Optical element with an optical axisZEISS CARL SMT AG·Filed 2002·Granted Nov 13, 2007·9 cites·27 claims
- 3063US2018259856A1Optical Projection SystemZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 3162US9891535B2Optical projection systemZEISS CARL SMT GMBH·Filed 2017·Granted Feb 13, 2018·0 cites·20 claims
- 3262US7457059B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2006·Granted Nov 25, 2008·2 cites·49 claims
- 3361US9810996B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2014·Granted Nov 7, 2017·0 cites·41 claims
- 3461US8102502B2Lithographic apparatus and device manufacturing methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2009·Granted Jan 24, 2012·0 cites·20 claims
- 3561US6366413B1Method of straightening the supporting surfaces of supporting elements for optical elementsZEISS STIFTUNG·Filed 2000·Granted Apr 2, 2002·7 cites·5 claims
- 3660US11281114B2Projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2020·Granted Mar 22, 2022·0 cites·29 claims
- 3760US2018181007A1Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 3859US8860922B2Lithographic apparatus and device manufacturing methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2012·Granted Oct 14, 2014·0 cites·22 claims
- 3958US10203607B2Optical element unit for exposure processesZEISS CARL SMT GMBH·Filed 2014·Granted Feb 12, 2019·0 cites·29 claims
- 4058US8009343B2Optical imaging device having at least one system diaphragmZEISS CARL SMT GMBH·Filed 2004·Granted Aug 30, 2011·6 cites·36 claims
- 4157US2023305290A1Mirror, optical system and method for operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4256US9046795B2Optical element unit for exposure processes having sealing elementSCHWERTNER TILMAN·Filed 2008·Granted Jun 2, 2015·1 cites·52 claims
- 4356US6842294B2Catadioptric objectiveZEISS CARL SMT AG·Filed 2002·Granted Jan 11, 2005·5 cites·2 claims
- 4456US2022283509A1Support of an optical unitZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 4556US2015168853A1Lithography apparatus with restricted movement relative to floor and related methodZEISS CARL SMT GMBH·Filed 2014·Application pending·0 cites
- 4655US7986472B2Optical element moduleZEISS CARL SMT AG·Filed 2006·Granted Jul 26, 2011·1 cites·38 claims
- 4754US8094287B2Lithographic appararus and methodVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Jan 10, 2012·0 cites·18 claims
- 4853US2014021324A1Lithography apparatus and methodZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 4952US2015138520A1Holding Device for an Optical Element in an ObjectiveASML NETHERLANDS BV·Filed 2014·Application pending·0 cites
- 5052US2008013063A1Optical imaging deviceZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
Showing the top 50 of 68 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →