Inventor · disambiguated record
Frank Melzer
Also filed as: MELZER FRANK
21 granted patents·5 pending applications·321 citations·filing 2001–2017
96Inventor score
Files withZEISS CARL SMT AG20MELZER FRANK3CARL ZEISS SMT1KENDRION KUHNKE AUTOMATION GMBH1ZEISS STIFTUNG1
Top patents by PatentIndex Score
26 records- 0193US7196841B2Lighting system, particularly for use in extreme ultraviolet (EUV) lithographyZEISS CARL SMT AG·Filed 2003·Granted Mar 27, 2007·50 cites·27 claims
- 0292US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0392US7244954B2Collector having unused region for illumination systems using a wavelength ≦193 nmZEISS CARL SMT AG·Filed 2005·Granted Jul 17, 2007·14 cites·27 claims
- 0491US7015489B2Collector having unused region for illumination systems using a wavelength less than or equal to 193 nmZEISS CARL SMT AG·Filed 2003·Granted Mar 21, 2006·36 cites·21 claims
- 0586US7460212B2Collector configured of mirror shellsZEISS CARL SMT AG·Filed 2007·Granted Dec 2, 2008·11 cites·14 claims
- 0686US6844994B2Optical element deformation systemZEISS CARL SMT AG·Filed 2001·Granted Jan 18, 2005·34 cites·45 claims
- 0784US6603615B2Precision positioning apparatus for positioning a component especially an optical componentZEISS STIFTUNG·Filed 2001·Granted Aug 5, 2003·34 cites·18 claims
- 0879US6897599B2System for damping oscillationsZEISS CARL SMT AG·Filed 2002·Granted May 24, 2005·20 cites·31 claims
- 0977US6655808B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2001·Granted Dec 2, 2003·13 cites·16 claims
- 1075US6700715B2Oscillation damping systemZEISS CARL SMT AG·Filed 2001·Granted Mar 2, 2004·16 cites·23 claims
- 1174US6836530B2Illumination system with a plurality of individual gratingsZEISS CARL SMT AG·Filed 2002·Granted Dec 28, 2004·16 cites·46 claims
- 1273US7354168B2Facet mirror having a number of mirror facetsZEISS CARL SMT AG·Filed 2004·Granted Apr 8, 2008·17 cites·6 claims
- 1370US7580207B2Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical componentZEISS CARL SMT AG·Filed 2006·Granted Aug 25, 2009·5 cites·10 claims
- 1467US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 1564US7410265B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2003·Granted Aug 12, 2008·7 cites·50 claims
- 1664US7090362B2Facet mirror having a number of mirror facetsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·9 cites·10 claims
- 1763US7034998B2Method of connecting a multiplicity of optical elements to a basic bodyZEISS CARL SMT AG·Filed 2001·Granted Apr 25, 2006·3 cites·10 claims
- 1860US8454230B2Method and system for indirect determination of local irradiance in an optical systemMELZER FRANK·Filed 2010·Granted Jun 4, 2013·1 cites·39 claims
- 1956US8269947B2Optical system for semiconductor lithographyMELZER FRANK·Filed 2009·Granted Sep 18, 2012·1 cites·21 claims
- 2053US9383544B2Optical system for semiconductor lithographyMELZER FRANK·Filed 2012·Granted Jul 5, 2016·0 cites·16 claims
- 2152US2009135395A1Optical system for semiconductor lithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 2250US7871171B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2008·Granted Jan 18, 2011·0 cites·67 claims
- 2345US2008042079A1Collector with fastening devices for fastening mirror shellsCARL ZEISS SMT·Filed 2007·Application pending·0 cites
- 2442US2009002670A1Apparatus for the manipulation and/or adjustment of an optical elementZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 2536US2018259984A1System for Supplying a Regulatable Inflow Fitting, and a Method for Filling the SystemKENDRION KUHNKE AUTOMATION GMBH·Filed 2017·Application pending·0 cites
- 2635US2007019310A1Facet mirrors and a method for producing mirror facetsZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →