Inventor · disambiguated record
Martin Antoni
Also filed as: ANTONI MARTIN
30 granted patents·6 pending applications·594 citations·filing 2000–2009
97Inventor score
Files withZEISS CARL SMT AG27ZEISS STIFTUNG3ZEISS CARL SEMICONDUCTOR MFG2ASML LITHOGRAPHY B V1CARL ZEISS SEMICONDUCTOR1
Top patents by PatentIndex Score
36 records- 0198US6438199B1Illumination system particularly for microlithographyZEISS STIFTUNG·Filed 2000·Granted Aug 20, 2002·199 cites·65 claims
- 0294US7977651B2Illumination system particularly for microlithographyZEISS CARL SMT GMBH·Filed 2009·Granted Jul 12, 2011·15 cites·20 claims
- 0393US7473907B2Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illuminationZEISS CARL SMT AG·Filed 2005·Granted Jan 6, 2009·26 cites·29 claims
- 0493US6535274B2Projection exposure deviceZEISS STIFTUNG·Filed 2001·Granted Mar 18, 2003·56 cites·18 claims
- 0592US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0688US6859328B2Illumination system particularly for microlithographyCARL ZEISS SEMICONDUCTOR·Filed 2002·Granted Feb 22, 2005·58 cites·24 claims
- 0785US7348565B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2007·Granted Mar 25, 2008·10 cites·27 claims
- 0884US7186983B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2004·Granted Mar 6, 2007·21 cites·21 claims
- 0979US7006595B2Illumination system particularly for microlithographyZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Feb 28, 2006·15 cites·22 claims
- 1079US6840640B2Multi mirror system for an illumination systemZEISS CARL SMT AG·Filed 2002·Granted Jan 11, 2005·18 cites·9 claims
- 1178US7583433B2Multi mirror system for an illumination systemZEISS CARL SMT AG·Filed 2004·Granted Sep 1, 2009·13 cites·25 claims
- 1278US7456408B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2008·Granted Nov 25, 2008·6 cites·14 claims
- 1377US6655808B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2001·Granted Dec 2, 2003·13 cites·16 claims
- 1475US7329886B2EUV illumination system having a plurality of light sources for illuminating an optical elementZEISS CARL SMT AG·Filed 2004·Granted Feb 12, 2008·18 cites·41 claims
- 1574US6947124B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Sep 20, 2005·13 cites·17 claims
- 1673US6636367B2Projection exposure deviceZEISS STIFTUNG·Filed 2001·Granted Oct 21, 2003·14 cites·15 claims
- 1771US7592598B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2008·Granted Sep 22, 2009·2 cites·19 claims
- 1871US6611574B2Illumination system with reduced heat loadZEISS CARL SEMICONDUCTOR MFG·Filed 2001·Granted Aug 26, 2003·10 cites·18 claims
- 1970US7443948B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2006·Granted Oct 28, 2008·2 cites·31 claims
- 2068US6927403B2Illumination system that suppresses debris from a light sourceASML LITHOGRAPHY B V·Filed 2002·Granted Aug 9, 2005·10 cites·29 claims
- 2168US6858853B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Feb 22, 2005·11 cites·16 claims
- 2267US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 2366US7142285B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Nov 28, 2006·9 cites·19 claims
- 2464US7410265B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2003·Granted Aug 12, 2008·7 cites·50 claims
- 2562US7109497B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Sep 19, 2006·8 cites·21 claims
- 2655US2008225258A1EUV illumination system having a folding geometryZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 2753US6947120B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Sep 20, 2005·3 cites·21 claims
- 2851US2009015812A1Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 2950US7871171B2Focusing-device for the radiation from a light sourceZEISS CARL SMT AG·Filed 2008·Granted Jan 18, 2011·0 cites·67 claims
- 3049US7400699B2Illumination system with raster elements of different sizesZEISS CARL SMT AG·Filed 2002·Granted Jul 15, 2008·2 cites·18 claims
- 3146USRE41667EIllumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Sep 14, 2010·1 cites·16 claims
- 3245US2008042079A1Collector with fastening devices for fastening mirror shellsCARL ZEISS SMT·Filed 2007·Application pending·0 cites
- 3344US2005002090A1EUV illumination system having a folding geometryZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 3442US2006132747A1Optical element for an illumination systemZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 3539US2005207039A1Optical element for forming an arc-shaped illumination fieldZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 3637USRE42065EIllumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2001·Granted Jan 25, 2011·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →