Inventor · disambiguated record
Eric R. Vaughan
Also filed as: VAUGHAN ERIC R
2 granted patents·1 pending application·112 citations·filing 2000–2001
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0188US6846149B2Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemAVIZA TECH INC·Filed 2001·Granted Jan 25, 2005·56 cites·6 claims
- 0288US6610150B1Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemASML US INC·Filed 2000·Granted Aug 26, 2003·56 cites·13 claims
- 0335US2001010950A1Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemSILICON VALLEY GROUP THERMAL·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →