Inventor · disambiguated record
Eugene Smargiassi
Also filed as: SMARGIASSI EUGENE
19 granted patents·1 pending application·978 citations·filing 1998–2018
96Inventor score
Files withNOVELLUS SYSTEMS INC9APPLIED MATERIALS INC4SMARGIASSI EUGENE3SHRINIVASAN KRISHNAN2HAVERKAMP JASON1
Top patents by PatentIndex Score
20 records- 0198US7935940B1Measuring in-situ UV intensity in UV cure toolNOVELLUS SYSTEMS INC·Filed 2008·Granted May 3, 2011·577 cites·19 claims
- 0296US8734663B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted May 27, 2014·19 cites·10 claims
- 0396US8282768B1Purging of porogen from UV cure chamberSMARGIASSI EUGENE·Filed 2009·Granted Oct 9, 2012·38 cites·20 claims
- 0495US8629068B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2013·Granted Jan 14, 2014·25 cites·3 claims
- 0595US8454750B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2007·Granted Jun 4, 2013·37 cites·22 claims
- 0694US8518210B2Purging of porogen from UV cure chamberSMARGIASSI EUGENE·Filed 2012·Granted Aug 27, 2013·16 cites·18 claims
- 0791US10121682B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2016·Granted Nov 6, 2018·5 cites·10 claims
- 0891US9384959B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2014·Granted Jul 5, 2016·7 cites·9 claims
- 0991US8980769B1Multi-station sequential curing of dielectric filmsHAVERKAMP JASON·Filed 2007·Granted Mar 17, 2015·19 cites·16 claims
- 1091US8283644B2Measuring in-situ UV intensity in UV cure toolSMARGIASSI EUGENE·Filed 2011·Granted Oct 9, 2012·21 cites·18 claims
- 1189US9073100B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 7, 2015·8 cites·23 claims
- 1283US9873946B2Multi-station sequential curing of dielectric filmsNOVELLUS SYSTEMS INC·Filed 2015·Granted Jan 23, 2018·3 cites·18 claims
- 1383US6231716B1Processing chamber with rapid wafer exchangeAPPLIED MATERIALS INC·Filed 1998·Granted May 15, 2001·92 cites·23 claims
- 1481US10020197B2Method for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2015·Granted Jul 10, 2018·2 cites·20 claims
- 1581US6515261B1Enhanced lift pinAPPLIED MATERIALS INC·Filed 2002·Granted Feb 4, 2003·26 cites·19 claims
- 1674US6535628B2Detection of wafer fragments in a wafer processing apparatusAPPLIED MATERIALS INC·Filed 1998·Granted Mar 18, 2003·70 cites·37 claims
- 1770US6807972B2Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamberAPPLIED MATERIALS INC·Filed 2002·Granted Oct 26, 2004·13 cites·12 claims
- 1861US11177131B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2018·Granted Nov 16, 2021·0 cites·20 claims
- 1954US2014080324A1Multi-station sequential curing of dielectric filmsNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 2036US10240236B2Clean resistant windows for ultraviolet thermal processingLAM RES CORP·Filed 2015·Granted Mar 26, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →