Inventor · disambiguated record
Fabrizio Evangelista
Also filed as: EVANGELISTA FABRIZIO
11 granted patents·1 pending application·34 citations·filing 2009–2019
86Inventor score
Files withASML NETHERLANDS BV5RIEPEN MICHEL2CORTIE ROGIER HENDRIKUS MAGDALENA1DIRECKS DANIEL JOZEF MARIA1DZIOMKINA NINA VLADIMIROVNA1
Top patents by PatentIndex Score
12 records- 0194US8614784B2Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supplyRIEPEN MICHEL·Filed 2010·Granted Dec 24, 2013·14 cites·19 claims
- 0292US9256136B2Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supplyCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2011·Granted Feb 9, 2016·7 cites·21 claims
- 0390US9846372B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 19, 2017·3 cites·20 claims
- 0483US10620544B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 0580US8902400B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Dec 2, 2014·4 cites·15 claims
- 0678US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 0767US9470985B2Lithographic apparatus, sensor and methodASML NETHERLANDS BV·Filed 2013·Granted Oct 18, 2016·1 cites·18 claims
- 0864US10209624B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 19, 2019·0 cites·20 claims
- 0955US9383654B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Jul 5, 2016·0 cites·23 claims
- 1054US11143968B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 12, 2021·0 cites·20 claims
- 1144US9625828B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Apr 18, 2017·0 cites·20 claims
- 1238US2011287371A1Component of an immersion system, an immersion lithographic apparatus and a device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →