Inventor · disambiguated record
Farzad Tabrizi
Also filed as: TABRIZI FARZAD
6 granted patents·1 pending application·859 citations·filing 1998–2012
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0197US6315512B1Systems and methods for robotic transfer of workpieces between a storage area and a processing chamberMATTSON TECH INC·Filed 1998·Granted Nov 13, 2001·737 cites·32 claims
- 0292US6647665B1Door systems for low contamination, high throughput handling of workpieces for vacuum processingMATTSON TECH INC·Filed 2000·Granted Nov 18, 2003·58 cites·18 claims
- 0390US6568552B1Systems and methods for low contamination, high throughput handling of workpieces for vacuum processingMATTSON TECH INC·Filed 2000·Granted May 27, 2003·45 cites·6 claims
- 0483US7976263B2Integrated wafer transfer mechanismBARKER DAVID·Filed 2007·Granted Jul 12, 2011·10 cites·25 claims
- 0581US9728436B2Transfer mechanism with multiple wafer handling capabilityDYNAMIC MICRO SYSTEMS·Filed 2012·Granted Aug 8, 2017·5 cites·19 claims
- 0668US8277165B2Transfer mechanism with multiple wafer handling capabilityTABRIZI FARZAD·Filed 2007·Granted Oct 2, 2012·4 cites·18 claims
- 0742US2004091349A1Methods for transporting wafers for vacuum processingFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →