Inventor · disambiguated record
Felix Gutman
Also filed as: GUTMAN FELIX · GUTMAN FELIX G
2 granted patents·5 pending applications·229 citations·filing 1996–2005
71Inventor score
Top patents by PatentIndex Score
7 records- 0192US6726823B1Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpiecesACM RES INC·Filed 1999·Granted Apr 27, 2004·124 cites·150 claims
- 0283US5811820AParallel ion optics and apparatus for high current low energy ion beamsMASSIVELY PARALLEL INSTR INC·Filed 1996·Granted Sep 22, 1998·105 cites·64 claims
- 0337US2007125661A1Controlling removal rate uniformity of an electropolishing process in integrated circuit fabricationACM RES INC·Filed 2005·Application pending·0 cites
- 0437US2007131561A1Controlling removal rate uniformity of an electropolishing process in integrated circuit fabricationACM RES INC·Filed 2004·Application pending·0 cites
- 0535US2005218003A1Electropolishing and/or electroplating apparatus and methodsACM RES INC·Filed 2003·Application pending·0 cites
- 0634US2004104120A1Method and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpiecesFiled 2003·Application pending·0 cites
- 0731US2004238481A1Electropolishing assembly and methods for electropolishing conductive layersFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →