Inventor · disambiguated record
Frank Bornebroek
Also filed as: BORNEBROEK FRANK
3 granted patents·316 citations·filing 1998–2012
75Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0196US7112813B2Device inspection method and apparatus using an asymmetric markerASML NETHERLANDS BV·Filed 2003·Granted Sep 26, 2006·61 cites·64 claims
- 0292US6297876B1Lithographic projection apparatus with an alignment system for aligning substrate on maskASM LITHOGRAPHY BV·Filed 1998·Granted Oct 2, 2001·255 cites·35 claims
- 0335US8642235B2Method of optimizing a die size, method of designing a pattern device manufacturing method, and computer program productVESELINOVIC PETAR·Filed 2012·Granted Feb 4, 2014·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →