Inventor · disambiguated record
Francois C. Dassapa
Also filed as: DASSAPA FRANCOIS C · DASSAPA FRANCOIS CHANDRASEKAR
3 granted patents·1 pending application·50 citations·filing 2003–2020
67Inventor score
Top patents by PatentIndex Score
4 records- 0193US10773282B2Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopyTOKYO ELECTRON LTD·Filed 2017·Granted Sep 15, 2020·45 cites·16 claims
- 0257US11273469B2Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopyTOKYO ELECTRON LTD·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 0353US7053994B2Method and apparatus for etch endpoint detectionLAM RES CORP·Filed 2003·Granted May 30, 2006·5 cites·19 claims
- 0435US2005217795A1Method of plasma etch endpoint detection using a V-I probe diagnosticsAVOYAN ARMEN·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →