Inventor · disambiguated record
Frank Huussen
Also filed as: HUUSSEN FRANK
19 granted patents·4,029 citations·filing 1995–2015
97Inventor score
Top patents by PatentIndex Score
19 records- 0198US7312156B2Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2004·Granted Dec 25, 2007·294 cites·25 claims
- 0298US6746240B2Process tube support sleeve with circumferential channelsASM INT·Filed 2003·Granted Jun 8, 2004·397 cites·58 claims
- 0398US6613685B1Method for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Sep 2, 2003·379 cites·46 claims
- 0498US6461439B1Apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Oct 8, 2002·371 cites·44 claims
- 0598US6183565B1Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 1999·Granted Feb 6, 2001·502 cites·41 claims
- 0696US6902395B2Multilevel pedestal for furnaceASM INT·Filed 2003·Granted Jun 7, 2005·368 cites·44 claims
- 0796US6481945B1Method and device for transferring wafersASM INT·Filed 1999·Granted Nov 19, 2002·540 cites·6 claims
- 0896US6328561B1Method for cooling a furnace, and furnace provided with a cooling deviceASM INT·Filed 1998·Granted Dec 11, 2001·354 cites·11 claims
- 0995US5662470AVertical furnaceASM INT·Filed 1995·Granted Sep 2, 1997·408 cites·11 claims
- 1094US6316371B1Method for the chemical treatment of a semiconductor substrateASM INT·Filed 1999·Granted Nov 13, 2001·346 cites·10 claims
- 1177US7128570B2Method and apparatus for purging seals in a thermal reactorASM INT·Filed 2005·Granted Oct 31, 2006·6 cites·29 claims
- 1275US9837271B2Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2015·Granted Dec 5, 2017·2 cites·26 claims
- 1374US7273819B2Method and apparatus for processing semiconductor substratesASM INT·Filed 2005·Granted Sep 25, 2007·4 cites·36 claims
- 1471US7006900B2Hybrid cascade model-based predictive control systemASM INT·Filed 2003·Granted Feb 28, 2006·34 cites·44 claims
- 1568US7749918B2Method and apparatus for processing semiconductor substratesASM INT·Filed 2007·Granted Jul 6, 2010·2 cites·25 claims
- 1663US6468903B2Pre-treatment of reactor parts for chemical vapor deposition reactorsASM INT·Filed 2001·Granted Oct 22, 2002·21 cites·12 claims
- 1755US8338210B2Method for processing solar cell substratesRIDDER DE CHRIS G M·Filed 2010·Granted Dec 25, 2012·1 cites·11 claims
- 1850US8455293B2Method for processing solar cell substratesASM INT·Filed 2012·Granted Jun 4, 2013·0 cites·12 claims
- 1947US9343304B2Method for depositing films on semiconductor wafersASM IP HOLDING BV·Filed 2014·Granted May 17, 2016·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →