Inventor · disambiguated record
Frank Schnappenberger
Also filed as: SCHNAPPENBERGER FRANK
5 granted patents·11 pending applications·3 citations·filing 2009–2022
64Inventor score
Top patents by PatentIndex Score
16 records- 0163US10174415B2Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatusSCHNAPPENBERGER FRANK·Filed 2013·Granted Jan 8, 2019·0 cites·17 claims
- 0262US8623184B2Device for supporting a rotatable target and sputtering apparatusSCHNAPPENBERGER FRANK·Filed 2011·Granted Jan 7, 2014·3 cites·20 claims
- 0361US2018135160A1Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatusAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 0457US2023113276A1Laser processing of lithium battery webAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0553US12358745B2Roll exchange chamber, roll-to-roll processing system and method of continuously providing a flexible substrateELEVATED MAT US LLC·Filed 2020·Granted Jul 15, 2025·0 cites·20 claims
- 0649US2011005924A1Target backing tube, cylindrical target, and cylindrical target assemblyAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0749US2011005925A1Target backing tube, cylindrical target assembly and sputtering systemAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0849US2011005923A1Sputtering system, rotatable cylindrical target assembly, backing tube, target element and cooling shieldAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0946US11795541B2Method of cooling a deposition source, chamber for cooling a deposition source and deposition systemAPPLIED MATERIALS INC·Filed 2017·Granted Oct 24, 2023·0 cites·9 claims
- 1046US10818475B2AC power connector, sputtering apparatus and method thereforSCHNAPPENBERGER FRANK·Filed 2013·Granted Oct 27, 2020·0 cites·22 claims
- 1142US2024409350A1Vacuum processing system, apparatus and method for transporting a thin film substrateSCHNAPPENBERGER FRANK·Filed 2021·Application pending·0 cites
- 1240US2022356027A1Roller for transporting a flexible substrate, vacuum processing apparatus, and methods thereforAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1340US2011192716A1Method for producing an ito layer and sputtering systemAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1439US2011240465A1End-block and sputtering installationAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1532US2016189939A1Mini rotatable sputter devices for sputter depositionDEPPISCH THOMAS·Filed 2012·Application pending·0 cites
- 1631US2011241272A1Device for supporting a rotatable target and sputtering installationAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →