Inventor · disambiguated record
Franz Sorg
Also filed as: SORG FRANZ
33 granted patents·7 pending applications·187 citations·filing 2000–2020
97Inventor score
Files withZEISS CARL SMT GMBH16ZEISS CARL SMT AG10SORG FRANZ3ZAHNRADFABRIK FRIEDRICHSHAFEN3EHRMANN ALBRECHT2
Top patents by PatentIndex Score
40 records- 0197US11003088B2Method and device for the correction of imaging defectsZEISS CARL SMT GMBH·Filed 2020·Granted May 11, 2021·6 cites·20 claims
- 0292US7529046B2Optical elementZEISS CARL SMT AG·Filed 2005·Granted May 5, 2009·16 cites·38 claims
- 0390US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0489US7265917B2Replacement apparatus for an optical elementZEISS CARL SMT AG·Filed 2004·Granted Sep 4, 2007·20 cites·31 claims
- 0586US6844994B2Optical element deformation systemZEISS CARL SMT AG·Filed 2001·Granted Jan 18, 2005·34 cites·45 claims
- 0684US7760327B2Reflecting optical element with eccentric optical passagewayZEISS CARL SMT AG·Filed 2006·Granted Jul 20, 2010·8 cites·55 claims
- 0779US6897599B2System for damping oscillationsZEISS CARL SMT AG·Filed 2002·Granted May 24, 2005·20 cites·31 claims
- 0878US8902519B2Replacement apparatus for an optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Dec 2, 2014·1 cites·20 claims
- 0977US8159648B2Method and device for the correction of imaging defectsSORG FRANZ·Filed 2008·Granted Apr 17, 2012·3 cites·8 claims
- 1077US7995296B2Replacement apparatus for an optical elementZEISS CARL SMT GMBH·Filed 2010·Granted Aug 9, 2011·1 cites·27 claims
- 1176US10197925B2Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant mannerZEISS CARL SMT GMBH·Filed 2014·Granted Feb 5, 2019·2 cites·37 claims
- 1276US8488261B2Replacement apparatus for an optical elementKUGLER JENS·Filed 2011·Granted Jul 16, 2013·1 cites·35 claims
- 1375US10509336B2Optical assembly having a thermally conductive componentZEISS CARL SMT GMBH·Filed 2017·Granted Dec 17, 2019·2 cites·34 claims
- 1475US9436095B2Exposure apparatus and measuring device for a projection lensZEISS CARL SMT GMBH·Filed 2012·Granted Sep 6, 2016·1 cites·22 claims
- 1575US6700715B2Oscillation damping systemZEISS CARL SMT AG·Filed 2001·Granted Mar 2, 2004·16 cites·23 claims
- 1674US7471469B2Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT AG·Filed 2005·Granted Dec 30, 2008·5 cites·45 claims
- 1771US7768723B2Replacement apparatus for an optical elementZEISS CARL SMT AG·Filed 2009·Granted Aug 3, 2010·1 cites·19 claims
- 1871US6449550B1Method for motor reduction while closing the bridging clutch of an automatic transmission for vehiclesZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2000·Granted Sep 10, 2002·17 cites·14 claims
- 1970US8330935B2Exposure apparatus and measuring device for a projection lensEHRMANN ALBRECHT·Filed 2010·Granted Dec 11, 2012·2 cites·24 claims
- 2069US10620543B2Method and device for the correction of imaging defectsZEISS CARL SMT GMBH·Filed 2019·Granted Apr 14, 2020·0 cites·16 claims
- 2167US9081296B2Replacement apparatus for an optical elementZEISS CARL SMT GMBH·Filed 2014·Granted Jul 14, 2015·0 cites·29 claims
- 2265US8659745B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsZEISS CARL SMT GMBH·Filed 2013·Granted Feb 25, 2014·1 cites·32 claims
- 2363US8711331B2Optical module for a microlithography objective including holding and supporting devicesKUGLER JENS·Filed 2005·Granted Apr 29, 2014·2 cites·27 claims
- 2462US8582081B2Device for the low-deformation replaceable mounting of an optical elementSORG FRANZ·Filed 2008·Granted Nov 12, 2013·2 cites·12 claims
- 2562US6441975B1Device for the low-deformation support of an optical element and method for the low-deformation support of the optical elementZEISS STIFTUNG·Filed 2000·Granted Aug 27, 2002·8 cites·10 claims
- 2661US10345710B2Microlithographic projection exposure apparatus and measuring device for a projection lensZEISS CARL SMT GMBH·Filed 2016·Granted Jul 9, 2019·0 cites·22 claims
- 2761US8488104B2Projection objective with diaphragmsDIECKMANN NILS·Filed 2011·Granted Jul 16, 2013·1 cites·20 claims
- 2861US2018373007A1Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant mannerZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 2960US11194119B2Optical assembly having a thermally conductive componentZEISS CARL SMT GMBH·Filed 2019·Granted Dec 7, 2021·0 cites·20 claims
- 3059US9977228B2Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant mannerZEISS CARL SMT GMBH·Filed 2014·Granted May 22, 2018·0 cites·31 claims
- 3159US7515363B2Replacement apparatus for an optical elementZEISS CARL SMT AG·Filed 2007·Granted Apr 7, 2009·0 cites·23 claims
- 3259US2016041475A1Replacement apparatus for an optical elementZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 3358US2016026094A1Method and device for the correction of imaging defectsZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 3457US2008309894A1Microlithographic projection exposure apparatus and measuring device for a projection lensZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 3555US7959536B2Method for shifting a motor vehicle automatic transmission with a hydrodynamic torque converter when the vehicle comes to a stopZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2006·Granted Jun 14, 2011·2 cites·9 claims
- 3655US2012176591A1Method and device for the correction of imaging defectsSORG FRANZ·Filed 2012·Application pending·0 cites
- 3755US2014063628A1Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 3848US2007070316A1Microlithographic projection exposure apparatus and measuring device for a projection lensEHRMANN ALBRECHT·Filed 2006·Application pending·0 cites
- 3945US8542346B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsLIMBACH GUIDO·Filed 2009·Granted Sep 24, 2013·0 cites·33 claims
- 4042US7131931B2Gearbox control systemZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2002·Granted Nov 7, 2006·3 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →